Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2007EUV reflectance and scattering of Mo/Si multilayers on differently polished substrates
Schröder, S.; Feigl, T.; Duparre, A.; Tünnermann, A.
Journal Article
2007UV-VIS-NIR scatter measurement methods for ultra precision surfaces and coatings
Gliech, S.; Wendt, R.; Duparre, A.
Conference Paper
2006Bulk scattering properties of synthetic fused silica at 193 nm
Schröder, S.; Kamprath, M.; Duparre, A.; Tünnermann, A.; Kühn, B.; Klett, U.
Journal Article
2002Light-scattering measurements of optical thin-film components at 157 and 193 nm
Gliech, S.; Steinert, J.; Duparre, A.
Journal Article
2000Roughness and Light Scattering of Ion-Beam-Sputtered Fluoride Coatings for 193 nm
Ferre-Borrull, J.; Duparre, A.; Quesnel, E.
Journal Article