Publica
Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten. | | |
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| 2007 | EUV reflectance and scattering of Mo/Si multilayers on differently polished substrates
Schröder, S.; Feigl, T.; Duparre, A.; Tünnermann, A. | Journal Article |
| 2007 | UV-VIS-NIR scatter measurement methods for ultra precision surfaces and coatings
Gliech, S.; Wendt, R.; Duparre, A. | Conference Paper |
| 2006 | Bulk scattering properties of synthetic fused silica at 193 nm
Schröder, S.; Kamprath, M.; Duparre, A.; Tünnermann, A.; Kühn, B.; Klett, U. | Journal Article |
| 2002 | Light-scattering measurements of optical thin-film components at 157 and 193 nm
Gliech, S.; Steinert, J.; Duparre, A. | Journal Article |
| 2000 | Roughness and Light Scattering of Ion-Beam-Sputtered Fluoride Coatings for 193 nm
Ferre-Borrull, J.; Duparre, A.; Quesnel, E. | Journal Article |