Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
1991Metallization of integrated circuits by laser evaporation of metal sandwich layers
Bollmann, D.; Haberger, K.; Pielmeier, R.
Conference Paper
1990Laser evaporation of metal sandwich layers for improved IC metallization
Pielmeier, R.; Bollmann, D.; Haberger, K.
Conference Paper