Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
20013D-electromagnetic field simulation for Low-k1 lithography applications
Erdmann, A.; Gordon, R.; McCallum, M.; Rosenbusch, A.
Journal Article
2001Benchmarking of available rigorous electromagnetic field (EMF) simulators for phase-shift mask applications
Kalus, C.; List, S.; Erdmann, A.; Gordon, R.; McCallum, M.; Semmler, A.
Journal Article
2001Optical simulation of 3D Mask effects
Rosenbusch, A.; Erdmann, A.; Friedrich, C.
Journal Article