Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2011Thickness determination of thin anodic titanium oxide films
Schneider, M.; Langklotz, U.; Michaelis, A.
Journal Article
2008Accelerated lifetime metrology of EUV multilayer mirrors in hydrocarbon environments
Hill, S.B.; Faradzhev, N.S.; Tarrio, C.; Lucatorto, T.B.; Madey, T.E.; Yakshinskiy, B.V.; Loginova, E.; Yulin, S.
Conference Paper
2002A comparative study of the UV optical and structural properties of SiO2, Al2O3, and HfO2 single layers deposited by reactive evaporation, ion-assisted deposition and plasma ion-assisted deposition
Thielsch, R.; Gatto, A.; Heber, J.; Kaiser, N.
Journal Article