Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
1995Closed loop MBE and CBE facility control with new software system
Hertel, B.
Conference Paper
1995In situ real time monitoring of film thickness and temperature during epitaxial growth by using Reflexion Supported Pyrometric Interferometry (RSPI)
Böbel, F.G.; Möller, H.; Hertel, B.; Märitz, J.; Wagner, J.; Chow, P.
Conference Paper
1994Pyrometric Interferometry (PI) for real time MBE process monitoring
Böbel, F.G.; Möller, H.; Hertel, B.; Wowchak, A.; Hove, J. van; Chow, P.
Journal Article