Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2007Development of functional ceramic films for nano- and microsystems
Schönecker, A.; Gebhardt, S.; Schlenkrich, F.; Endler, I.; Meissner, F.; Michaelis, A.; Mayer-Uhma, T.; Uhlig, S.
Conference Paper
2007Nondestructive characterization of sub-surface damage in rotational ground silicon wafers by laser acoustics
Pähler, D.; Schneider, D.; Herben, M.
Journal Article
1993Electronic study of plasma-induced damage in GaAs heterostructures.
Zappe, H.P.
Journal Article
1991Electrical damage due to low energy plasma processing of GaAs structures
Kaufel, G.; Zappe, H.P.
Conference Paper
1990Influence of dry etch conditions on the properties of Schottky contacts to n-GaAs
Pletschen, W.; Bachem, K.H.; Hornung, J.; Kaufel, G.; Köhler, K.
Conference Paper
1990Influence of plasma and ion beams on the electrical properties on n-GaAs Schottky diodes.
Pletschen, W.; Bachem, K.H.
Journal Article