Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2006Process stabilisation for large area reactive MF-sputtering of Al-doped ZnO
Ruske, F.; Pflug, A.; Sittinger, V.; Werner, W.; Szyszka, B.
Journal Article
2005Structure, properties and applications of diamond-like carbon coatings prepared by reactive magnetron sputtering
Bewilogua, K.; Brand, J.; Thomsen, H.; Weber, M.; Wittorf, R.
Journal Article
2004Photocatalytic properties of doped TiO2 and of Ti-based mixed oxide thin films prepared by reactive pulse magnetron sputtering
Vergöhl, M.; Frach, P.; Neumann, F.; Hunsche, B.; Glöß, D.
Conference Paper
2004Pulse magnetron sputtering in a reactive gas mixture of variable composition to manufacture multilayer and gradient optical coatings
Lange, S.; Bartzsch, H.; Frach, P.; Goedicke, K.
Conference Paper