Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2010Optical on-line monitoring for the long-term stabilization of a reactive mid-frequency sputtering process of Al-doped zinc oxide films
Sittinger, V.; Ruske, F.; Pflug, A.; Pflug, A.; Dewald, W.; Szyszka, B.; Dittmar, G.
Journal Article
2004Modeling of the film thickness distribution along transport direction in in-line coaters for reactive sputtering
Pflug, A.; Szyszka, B.; Geisler, M.; Kastner, A.; Braatz, C.; Schreiber, U.; Bruch, J.
Conference Paper