Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2018TiOx deposited by magnetron sputtering
Tonneau, R.; Moskovkin, P.; Pflug, A.; Lucas, S.
Journal Article
2017Investigations of electron beam hardening on TiAlN coated heat-treatable steel
Weigel, K.; Keunecke, M.; Bewilogua, K.; Bräuer, G.; Grumbt, G.; Zenker, R.; Biermann, H.
Journal Article
2016Roll to roll deposition of silicon nitride permeation barrier coatings using rotatable magnetrons
Fahland, M.; Fahlteich, J.; Himmler, A.; Vogt, T.; Zywitzki, O.; Linss, V.
Conference Paper
2015Electron beam hardening of PVD-coated steels
Grumbt, G.; Zenker, R.; Biermann, H.; Weigel, K.; Bewilogua, K.; Bräuer, G.
Journal Article
2014Effects of electron beam treatment on Ti(1-x)AlxN coatings on steel
Weigel, K.; Bewilogua, K.; Keunecke, M.; Bräuer, G.; Grumbt, G.; Zenker, R.; Biermann, H.
Journal Article
2014Progress on optical coatings deposited with dual rotatable magnetrons in a sputter up system
Vergöhl, M.; Rademacher, D.; Pflug, A.
Journal Article, Conference Paper
2012High rate deposition of mixed oxides by controlled reactive magnetron-sputtering from metallic targets
Bruns, S.; Vergöhl, M.; Werner, O.; Wallendorf, T.
Journal Article, Conference Paper
2011Optical and thin film properties of mixed oxides deposited by pulsed reactive magnetron sputtering
Bruns, S.; Vergöhl, M.
Conference Paper
2010High rate deposition of mixed oxides by controlled reactive magnetron-sputtering from metallic targets
Bruns, S.; Vergöhl, M.; Werner, O.; Wallendorf, T.
Conference Paper
2010Particle generation during reactive sputtering of SiO2 with planar and cylindrical magnetrons
Vergöhl, M.; Rademacher, D.
Conference Paper
2009Aluminium nitride: A promising and full CMOS compatible piezoelectric material for MOEMS applications
Conrad, H.; Schmidt, J.U.; Pufe, W.; Zimmer, F.; Sandner, T.; Schenk, H.; Lakner, H.
Conference Paper
2006DLC based coatings for tribological applications
Bewilogua, K.; Bialuch, I.; Brand, J.; Keunecke, M.; Ruske, H.; Thomsen, H.; Weber, M.; Wittorf, R.
Conference Paper
2002Ensuring long term stability of process and film parameters during target lifetime in reactive magnetron sputtering
Bartzsch, H.; Frach, P.; Goedicke, K.; Böcher, B.; Gottfried, C.
Conference Paper
2000In-situ spectroscopic ellipsometry and plasma control for large-scale magnetron sputter deposition processes
Vergöhl, M.; Malkomes, N.; Matthée, T.; Bräuer, G.
Conference Paper
2000Real-time control of reactive magnetron-sputter deposited optical filters by in situ spectroscopic ellipsometry
Vergöhl, M.; Malkomes, N.; Matthée, T.; Bräuer, G.
Conference Paper, Journal Article