Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2007Determination of plasma parameters during deposition of ZnO films by ceramic and metallic targets and correlation with film properties
Wiese, R.; Kersten, H.; Hannemann, M.; Sittinger, V.; Ruske, F.; Menner, R.
Conference Paper
2007Flux of positive ions and film growth in reactive sputtering of Al-doped ZnO thin films
Ruske, F.; Sittinger, V.; Werner, W.; Szyszka, B.; Wiese, R.
Conference Paper