Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2019Hermetical sealing of pressure sensor diaphragms by CVD of Si1-XGeX with minimized cavity deposition
Walk, Christian; Netaev, Alexander; Görtz, Michael; Mokwa, Wilfried; Vogt, Holger
Conference Paper
2019Hermeticity of SI1-XGeX diaphragms for the fabrication of a capacitive post-CMOS pressure sensor
Walk, Christian; Netaev, Alexander; Wiemann, Matthias; Görtz, Michael; Vogt, Holger; Mokwa, Wilfried; Seidl, Karsten
Conference Paper
2019Miniaturized multi sensor implant for monitoring of hemodynamic parameters
Dogan, Özgü; Schierbaum, Nicolas; Weidenmüller, Jens; Baum, Mario; Schröder, Thomas; Wünsch, Dirk; Görtz, Michael; Seidl, Karsten
Conference Paper
2017Development of a patterning process for releasing and sealing of post-CMOS MEMS pressure sensor membranes
Walk, Christian; Vidovic, Nino; Görtz, Michael; Vogt, Holger
Conference Paper
2017DRUGAS: Implantable telemetric system for measuring the portal venous pressure: Assembly aspects
Fischer, Roland; Weidenmüller, Jens; Görtz, Michael; Göttsche, Thorsten; Mokwa, Wilfried
Journal Article
2017Overview on an implantable multi sensor system for cardiovascular monitoring
Görtz, Michael; Grabmaier, Anton; Wiemer, Maik; Storsberg, Joachim; Duschl, Claus; Vom Bögel, Gerd
Journal Article, Conference Paper
2017A side-wall spacer process for releasing and sealing of post-CMOS MEMS pressure sensor membranes
Walk, Christian; Görtz, Michael; Mokwa, Wilfried; Vogt, Holger
Conference Paper
2017Telemetric multi-sensor system for medical applications - the approach
Weidenmüller, Jens; Walk, Christian; Dogan, Özgü; Gembaczka, Pierre; Stanitzki, Alexander; Görtz, Michael
Journal Article
2017An ultra-low noise capacitance to voltage converter for sensor applications in 0.35  µm CMOS
Utz, Alexander; Walk, Christian; Haas, Norbert; Fedtschenko, Tatjana; Stanitzki, Alexander; Mokhtari, Mehran; Görtz, Michael; Kraft, Michael; Kokozinski, Rainer
Journal Article
2016Development of a system concept for miniaturized cardiovascular multi sensor implants
Dogan, Özgü; Walk, Christian; Weidenmüller, Jens; Gembaczka, Pierre; Stanitzki, Alexander; Görtz, Michael
Journal Article, Conference Paper
2016Joining technologies for a temperature-stable integration of a LTCC-based pressure sensor
Schilm, Jochen; Goldberg, Adrian; Partsch, Uwe; Dürfeld, Wolfgang; Arndt, Dietmar; Pönicke, Andreas; Michaelis, Alexander
Journal Article
2014Development of an implantable integrated MEMS pressure sensor using polyimide epoxy composite and Atomic Layer Deposition for encapsulation
Gembaczka, Pierre; Görtz, Michael; Kraft, Michael
Journal Article, Conference Paper
2014Encapsulation of implantable integrated MEMS pressure sensors using polyimide epoxy composite and atomic layer deposition
Gembaczka, Pierre; Görtz, Michael; Celik, Yusuf; Jupe, Andreas; Stühlmeyer, Martin; Goehlich, Andreas; Vogt, Holger; Mokwa, Wilfried; Kraft, Michael
Journal Article
2014Implantable sensor to measure liquor pressure of a ventricular drainage system
Görtz, Michael; Bögel, G. vom; Gembaczka, Pierre; Kraft, Michael
Journal Article, Conference Paper
2014Eine offene Telemetrieplattform für implantierbare Medizintechnik
Wallrodt, M.; Harnack, M.; Görtz, Michael; Fischer, R.; Mokwa, Wilfried; Biela, S.; Pfennig, M.; Schmitz-Rode, Thomas
Journal Article
2013High precision pressure sensors based on SAW devices in the GHz range
Rodríguez-Madrid, J.G.; Iriarte, G.F.; Williams, O.A.; Calle, F.
Journal Article
2013Ongoing development and first long-term trials of a cardiac output monitoring system in the pulmonary artery (COMPASS)
Pfennig, M.; Cleven, Nina J.; Biela, S.; Urbaszek, Albrecht; Ooyen, A. van; Görtz, Michael; Mokwa, Wilfried; Schmitz-Rode, Thomas
Journal Article, Conference Paper
2013State of the art telemetric implantable sensors and their encapsulation
Kraft, Michael; Görtz, Michael; Müntjes, Jutta A.; Mokwa, Wilfried; Cleven, Nina J.; Schmitz-Rode, Thomas
Conference Paper
2013Verkapselungstechniken für implantierbare integrierte MEMS Drucksensoren
Görtz, Michael; Betz, Wolfgang; Mokwa, Wilfried; Vogt, Holger; Kraft, Michael
Conference Paper
2011Reply to the "comment on 'piezoresistive effect in SiOC ceramics for integrated pressure sensors' "
Nuffer, J.; Riedel, R.
Journal Article
2011Wireless integrated pressure sensor for quality control of vacuum insulation panel
Bögel, G. vom; Trieu, H.-K.; Görtz, M.; Grabmaier, A.
Conference Paper
2010Entwicklung eines implantierbaren Drucksensors zum kontinuierlichen Monitoring des pulmonalarteriellen Drucks bei Herzinsuffizienzpatienten
Urbaszek, Albrecht; Trieu, Hoc-Khiem; Traulsen, Tim; Mokwa, Wilfried
Conference Paper, Journal Article
2010Feasibility study of an integrated pressure sensor transponder for triggering of a pacemaker in the treatment of dysphagia
Betz, Wolfgang; Görtz, Michael; Feussner, H.; Schneider, A.; Knödgen, Fritz; Trieu, Hoc-Khiem
Conference Paper, Journal Article
2010Integrated MEMS solutions for biomedical applications
Trieu, H.-K.
Conference Paper
2010Micro implants and bioelectronics - new technologies in medical diagnostics and therapy
Trieu, H.-K.
Conference Paper
2010Monitoring intravascular pressure with a pulmonary artery pressure sensor system - assembly aspects
Müntjes, J.; Meine, S.; Flach, E.; Görtz, M.; Hartmann, R.; Schmitz-Rode, T.; Trieu, H.-K.; Mokwa, W.
Conference Paper
2010Sensing and signal conditioning at 250°C
Trieu, H.-K.; Klieber, R.; Kordas, N.
Journal Article
2009Actuators to be integrated in low temperature cofired ceramics (LTCC) microfluidic systems
Klumbies, H.; Partsch, U.; Goldberg, A.; Gebhardt, S.; Keitel, U.; Neubert, H.
Conference Paper
2009Assembly of pressure sensor chips as an example for integrated MEMS for high temperature applications
Klieber, R.; Goehlich, A.; Trieu, H.-K.; Kappert, H.; Grabmaier, A.
Conference Paper
2009High-temperature SOI CMOS compatible MEMS pressure sensors
Lerch, Renee G.; Kordas, Norbert; Klieber, Robert; Kokozinski, Rainer
Conference Paper
2005Pressure sensor capsule to control the treatment of abdominal aorta aneurisms
Schlierf, R.; Görtz, M.; Rode, T.S.; Mokwa, W.; Schnakenberg, U.; Trieu, H.-K.
Conference Paper
2005Strength analysis of etched silicon pressure sensors
Ebert, M.; Knaup, M.; Stelzer, T.; Bagdahn, J.; Bartuch, H.; Brokmann, G.
Conference Paper
2004Cost-effective test, calibration and assembly infrastructure for turnkey integrated pressure sensors
Trieu, H.-K.; Köster, O.; Vogt, H.
Conference Paper
2003Kohärente Layoutsynthese und Modellbildung von skalierbaren mikroelektromechanischen Strukturen
Voßkämper, L.M.
Dissertation
2002Intravascular pressure monitoring system
Schnakenberg, U.; Krüger, C.; Pfeffer, J.-G.; Mokwa, W.; Bögel, G. vom; Günther, R.; Schmitz-Rode, T.
Conference Paper
2002Intravascular pressure monitoring system
Krüger, C.; Pfeffer, J.G.; Mokwa, W.; Bögel, G. vom; Günther, R.; Schmitz-Rhode, T.; Schnakenberg, U.
Conference Paper
2002Transponder system for non-invasive measurement of intravascular pressure
Schnakenberg, U.; Krüger, C.; Pfeffer, J.G.; Mokwa, W.; Bögel, G. vom; Günther, R.; Schmitz-Rhode, T.
Conference Paper
2001A programmable intraocular CMOS pressure sensor system implant
Stangel, K.; Kolnsberg, S.; Hammerschmidt, D.; Hosticka, B.J.; Trieu, H.-K.; Mokwa, W.
Conference Paper
2000Development of a completely encapsulated intraocular pressure sensor
Walter, P.; Schnakenberg, U.; VomBögel, G.; Ruokonen, P.; Krüger, C.; Dinslage, S.; Lüdtke Handjery, H.C.; Richter, H.; Mokwa, W.; Diestelhorst, M.; Krieglstein, G.K.
Journal Article
2000Micro coils for an advanced system for measuring intraocular pressure
Ullerich, S.; Mokwa, W.; VomBögel, G.; Schnakenberg, U.
Conference Paper
2000Monolithic integrated surface micromachined pressure sensors with analog on-chip linearization and temperature compensation
Trieu, H.-K.; Knier, M.; Köster, O.; Kappert, H.; Schmidt, M.; Mokwa, W.
Conference Paper
2000On-chip programmable monolithic integrated pressure sensor for high pressure applications
Trieu, H.K.; Köster, O.; Knier, M.; Kappert, H.; Mowka, W.
Conference Paper
2000A programmable intraocular CMOS pressure sensor system implant
Stangel, K.; Kolnsberg, S.; Hammerschmidt, D.; Hosticka, B.J.; Trieu, H.-K.; Mokwa, W.
Conference Paper
2000Remote CMOS pressure sensor chip with wireless power and data transmission
Boom, T. van den; Teßmann, D.; Lerch, R.G.; VomBögel, G.; Hammerschmidt, D.; Amelung, J.; Hosticka, B.J.; Mahdavi, P.
Conference Paper
1999Electromechanical modeling beyond VHDL-AMS
Voßkämper, L.; Lüdecke, A.; Leineweber, M.; Pelz, G.
Conference Paper
1999Surface micromachined high temperature pressure sensors on SIMOX-substrates
Kasten, K.; Amelung, J.; Mokwa, W.
Conference Paper
1998CMOS sensor systems
Hosticka, B.J.
Conference Paper
1994Ein monolithisch integriertes CMOS-Drucksensorsystem mit Temperaturkompensation und On-Chip gespeicherten Kalibrationsdaten
Hammerschmidt, D.; Schnatz, F.V.; Brockherde, W.; Hosticka, B.J.; Schlichting, V.; Obermeier, E.
Conference Paper
1994Silizium - Werkstoff der Mikrosystemtechnik
Dudaicevs, H.; Mokwa, W.
Conference Paper
1994Surface micromachined pressure sensors with integrated CMOS read-out electronics
Dudaicevs, H.; Kandler, M.; Manoli, Y.; Mokwa, W.; Spiegel, E.
Conference Paper
1994Temperaturkompensation von Sensorsystemen durch CMOS-Schaltungen
Hammerschmidt, D.; Sprotte, A.; Schnatz, F.V.; Brockherde, W.; Hosticka, B.J.; Dura, H.-G.; Dudaicevs, H.; Mokwa, W.
Conference Paper
1993Surface micromachined pressure sensors with integrated CMOS read-out electronics
Dudaicevs, H.; Kandler, M.; Manoli, Y.; Mokwa, W.; Spiegel, E.
Conference Paper
1991Non-linear analytical modelling of bossed diaphragms for pressure sensors
Sandmaier, H.
Conference Paper
1990Development and simulation of a silicon-based pressure sensor with digital output
Anton, J.; Steger, U.; Dominguez, C.; Samitier, J.; Sandmaier, H.
Conference Paper
1990Piezoresistive pressure sensors representing the 2nd generation avoid the physical limits based on conventional designs
Sandmaier, H.
Conference Paper