Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2019Hermetical sealing of pressure sensor diaphragms by CVD of Si1-XGeX with minimized cavity deposition
Walk, Christian; Netaev, Alexander; Görtz, Michael; Mokwa, Wilfried; Vogt, Holger
Conference Paper
2017Development of a patterning process for releasing and sealing of post-CMOS MEMS pressure sensor membranes
Walk, Christian; Vidovic, Nino; Görtz, Michael; Vogt, Holger
Conference Paper
2017DRUGAS: Implantable telemetric system for measuring the portal venous pressure: Assembly aspects
Fischer, Roland; Weidenmüller, Jens; Görtz, Michael; Göttsche, Thorsten; Mokwa, Wilfried
Journal Article
2017Overview on an implantable multi sensor system for cardiovascular monitoring
Görtz, Michael; Grabmaier, Anton; Wiemer, Maik; Storsberg, Joachim; Duschl, Claus; Vom Bögel, Gerd
Journal Article, Conference Paper
2017A side-wall spacer process for releasing and sealing of post-CMOS MEMS pressure sensor membranes
Walk, Christian; Görtz, Michael; Mokwa, Wilfried; Vogt, Holger
Conference Paper
2017Telemetric multi-sensor system for medical applications - the approach
Weidenmüller, Jens; Walk, Christian; Dogan, Özgü; Gembaczka, Pierre; Stanitzki, Alexander; Görtz, Michael
Journal Article
2017An ultra-low noise capacitance to voltage converter for sensor applications in 0.35  µm CMOS
Utz, Alexander; Walk, Christian; Haas, Norbert; Fedtschenko, Tatjana; Stanitzki, Alexander; Mokhtari, Mehran; Görtz, Michael; Kraft, Michael; Kokozinski, Rainer
Journal Article
2016Development of a system concept for miniaturized cardiovascular multi sensor implants
Dogan, Özgü; Walk, Christian; Weidenmüller, Jens; Gembaczka, Pierre; Stanitzki, Alexander; Görtz, Michael
Journal Article, Conference Paper
2016Joining technologies for a temperature-stable integration of a LTCC-based pressure sensor
Schilm, Jochen; Goldberg, Adrian; Partsch, Uwe; Dürfeld, Wolfgang; Arndt, Dietmar; Pönicke, Andreas; Michaelis, Alexander
Journal Article
2014Development of an implantable integrated MEMS pressure sensor using polyimide epoxy composite and Atomic Layer Deposition for encapsulation
Gembaczka, Pierre; Görtz, Michael; Kraft, Michael
Journal Article, Conference Paper
2014Encapsulation of implantable integrated MEMS pressure sensors using polyimide epoxy composite and atomic layer deposition
Gembaczka, Pierre; Görtz, Michael; Celik, Yusuf; Jupe, Andreas; Stühlmeyer, Martin; Goehlich, Andreas; Vogt, Holger; Mokwa, Wilfried; Kraft, Michael
Journal Article
2014Implantable sensor to measure liquor pressure of a ventricular drainage system
Görtz, Michael; Bögel, G. vom; Gembaczka, Pierre; Kraft, Michael
Journal Article, Conference Paper
2014Eine offene Telemetrieplattform für implantierbare Medizintechnik
Wallrodt, M.; Harnack, M.; Görtz, Michael; Fischer, R.; Mokwa, Wilfried; Biela, S.; Pfennig, M.; Schmitz-Rode, Thomas
Journal Article
2013High precision pressure sensors based on SAW devices in the GHz range
Rodríguez-Madrid, J.G.; Iriarte, G.F.; Williams, O.A.; Calle, F.
Journal Article
2013Ongoing development and first long-term trials of a cardiac output monitoring system in the pulmonary artery (COMPASS)
Pfennig, M.; Cleven, Nina J.; Biela, S.; Urbaszek, Albrecht; Ooyen, A. van; Görtz, Michael; Mokwa, Wilfried; Schmitz-Rode, Thomas
Journal Article, Conference Paper
2013State of the art telemetric implantable sensors and their encapsulation
Kraft, Michael; Görtz, Michael; Müntjes, Jutta A.; Mokwa, Wilfried; Cleven, Nina J.; Schmitz-Rode, Thomas
Conference Paper
2013Verkapselungstechniken für implantierbare integrierte MEMS Drucksensoren
Görtz, Michael; Betz, Wolfgang; Mokwa, Wilfried; Vogt, Holger; Kraft, Michael
Conference Paper
2011Reply to the "comment on 'piezoresistive effect in SiOC ceramics for integrated pressure sensors' "
Nuffer, J.; Riedel, R.
Journal Article
2011Wireless integrated pressure sensor for quality control of vacuum insulation panel
Bögel, G. vom; Trieu, H.-K.; Görtz, M.; Grabmaier, A.
Conference Paper
2010Entwicklung eines implantierbaren Drucksensors zum kontinuierlichen Monitoring des pulmonalarteriellen Drucks bei Herzinsuffizienzpatienten
Urbaszek, Albrecht; Trieu, Hoc-Khiem; Traulsen, Tim; Mokwa, Wilfried
Conference Paper, Journal Article
2010Feasibility study of an integrated pressure sensor transponder for triggering of a pacemaker in the treatment of dysphagia
Betz, Wolfgang; Görtz, Michael; Feussner, H.; Schneider, A.; Knödgen, Fritz; Trieu, Hoc-Khiem
Conference Paper, Journal Article
2010Integrated MEMS solutions for biomedical applications
Trieu, H.-K.
Conference Paper
2010Micro implants and bioelectronics - new technologies in medical diagnostics and therapy
Trieu, H.-K.
Conference Paper
2010Monitoring intravascular pressure with a pulmonary artery pressure sensor system - assembly aspects
Müntjes, J.; Meine, S.; Flach, E.; Görtz, M.; Hartmann, R.; Schmitz-Rode, T.; Trieu, H.-K.; Mokwa, W.
Conference Paper
2010Sensing and signal conditioning at 250°C
Trieu, H.-K.; Klieber, R.; Kordas, N.
Journal Article
2009Actuators to be integrated in low temperature cofired ceramics (LTCC) microfluidic systems
Klumbies, H.; Partsch, U.; Goldberg, A.; Gebhardt, S.; Keitel, U.; Neubert, H.
Conference Paper
2009Assembly of pressure sensor chips as an example for integrated MEMS for high temperature applications
Klieber, R.; Goehlich, A.; Trieu, H.-K.; Kappert, H.; Grabmaier, A.
Conference Paper
2009High-temperature SOI CMOS compatible MEMS pressure sensors
Lerch, Renee G.; Kordas, Norbert; Klieber, Robert; Kokozinski, Rainer
Conference Paper
2005Pressure sensor capsule to control the treatment of abdominal aorta aneurisms
Schlierf, R.; Görtz, M.; Rode, T.S.; Mokwa, W.; Schnakenberg, U.; Trieu, H.-K.
Conference Paper
2005Strength analysis of etched silicon pressure sensors
Ebert, M.; Knaup, M.; Stelzer, T.; Bagdahn, J.; Bartuch, H.; Brokmann, G.
Conference Paper
2004Cost-effective test, calibration and assembly infrastructure for turnkey integrated pressure sensors
Trieu, H.-K.; Köster, O.; Vogt, H.
Conference Paper
2003Kohärente Layoutsynthese und Modellbildung von skalierbaren mikroelektromechanischen Strukturen
Voßkämper, L.M.
Dissertation
2002Intravascular pressure monitoring system
Schnakenberg, U.; Krüger, C.; Pfeffer, J.-G.; Mokwa, W.; Bögel, G. vom; Günther, R.; Schmitz-Rode, T.
Conference Paper
2002Intravascular pressure monitoring system
Krüger, C.; Pfeffer, J.G.; Mokwa, W.; Bögel, G. vom; Günther, R.; Schmitz-Rhode, T.; Schnakenberg, U.
Conference Paper
2002Transponder system for non-invasive measurement of intravascular pressure
Schnakenberg, U.; Krüger, C.; Pfeffer, J.G.; Mokwa, W.; Bögel, G. vom; Günther, R.; Schmitz-Rhode, T.
Conference Paper
2001A programmable intraocular CMOS pressure sensor system implant
Stangel, K.; Kolnsberg, S.; Hammerschmidt, D.; Hosticka, B.J.; Trieu, H.-K.; Mokwa, W.
Conference Paper
2000Development of a completely encapsulated intraocular pressure sensor
Walter, P.; Schnakenberg, U.; VomBögel, G.; Ruokonen, P.; Krüger, C.; Dinslage, S.; Lüdtke Handjery, H.C.; Richter, H.; Mokwa, W.; Diestelhorst, M.; Krieglstein, G.K.
Journal Article
2000Micro coils for an advanced system for measuring intraocular pressure
Ullerich, S.; Mokwa, W.; VomBögel, G.; Schnakenberg, U.
Conference Paper
2000Monolithic integrated surface micromachined pressure sensors with analog on-chip linearization and temperature compensation
Trieu, H.-K.; Knier, M.; Köster, O.; Kappert, H.; Schmidt, M.; Mokwa, W.
Conference Paper
2000On-chip programmable monolithic integrated pressure sensor for high pressure applications
Trieu, H.K.; Köster, O.; Knier, M.; Kappert, H.; Mowka, W.
Conference Paper
2000A programmable intraocular CMOS pressure sensor system implant
Stangel, K.; Kolnsberg, S.; Hammerschmidt, D.; Hosticka, B.J.; Trieu, H.-K.; Mokwa, W.
Conference Paper
2000Remote CMOS pressure sensor chip with wireless power and data transmission
Boom, T. van den; Teßmann, D.; Lerch, R.G.; VomBögel, G.; Hammerschmidt, D.; Amelung, J.; Hosticka, B.J.; Mahdavi, P.
Conference Paper
1999Electromechanical modeling beyond VHDL-AMS
Voßkämper, L.; Lüdecke, A.; Leineweber, M.; Pelz, G.
Conference Paper
1999Surface micromachined high temperature pressure sensors on SIMOX-substrates
Kasten, K.; Amelung, J.; Mokwa, W.
Conference Paper
1998CMOS sensor systems
Hosticka, B.J.
Conference Paper
1994Ein monolithisch integriertes CMOS-Drucksensorsystem mit Temperaturkompensation und On-Chip gespeicherten Kalibrationsdaten
Hammerschmidt, D.; Schnatz, F.V.; Brockherde, W.; Hosticka, B.J.; Schlichting, V.; Obermeier, E.
Conference Paper
1994Silizium - Werkstoff der Mikrosystemtechnik
Dudaicevs, H.; Mokwa, W.
Conference Paper
1994Surface micromachined pressure sensors with integrated CMOS read-out electronics
Dudaicevs, H.; Kandler, M.; Manoli, Y.; Mokwa, W.; Spiegel, E.
Conference Paper
1994Temperaturkompensation von Sensorsystemen durch CMOS-Schaltungen
Hammerschmidt, D.; Sprotte, A.; Schnatz, F.V.; Brockherde, W.; Hosticka, B.J.; Dura, H.-G.; Dudaicevs, H.; Mokwa, W.
Conference Paper
1993Surface micromachined pressure sensors with integrated CMOS read-out electronics
Dudaicevs, H.; Kandler, M.; Manoli, Y.; Mokwa, W.; Spiegel, E.
Conference Paper
1991Non-linear analytical modelling of bossed diaphragms for pressure sensors
Sandmaier, H.
Conference Paper
1990Development and simulation of a silicon-based pressure sensor with digital output
Anton, J.; Steger, U.; Dominguez, C.; Samitier, J.; Sandmaier, H.
Conference Paper
1990Piezoresistive pressure sensors representing the 2nd generation avoid the physical limits based on conventional designs
Sandmaier, H.
Conference Paper
1990Simulationswerkzeuge zum Design systemfähiger Mikrosensoren
Sandmaier, H.
Conference Proceedings
1990Smart silicon system for a multi sensor catheter
Eichholz, J.; Kandler, M.; Kordas, N.; Langerbein, A.; Manoli, Y.; Mokwa, W.
Conference Paper
1989Selection criteria for metals and plastics as construction materials for long term pressure-testing apparatus on liquid propellants.
Backof, E.
Conference Paper