Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2017Quantitative characterization of surface topography using spectral analysis
Jacobs, T; Junge, T.; Pastewka, L.
Journal Article
2015Characterization of Mo/Si mirror interface roughness for different Mo layer thickness using resonant diffuse EUV scattering
Haase, Anton; Soltwitsch, Victor; Scholze, Frank; Braun, Stefan
Conference Paper
2012Optical performance of LPP multilayer collector mirrors
Feigl, Torsten; Perske, Marco; Pauer, Hagen; Fiedler, Tobias; Yulin, Sergiy; Trost, Marcus; Schroeder, Sven; Duparré, Angela; Kaiser, Norbert; Tünnermann, Andreas; Böwering, Norbert; Ershov, Alex; Hoffmann, Kay; La Fontaine, Bruno; Cummings, Kevin D.
Conference Paper
2012Roughness characterization of EUV multilayer coatings and ultra-smooth surfaces by light scattering
Trost, Marcus; Schröder, Sven; Lin, C.C.; Duparré, Angela; Tünnermann, Andreas
Conference Paper
2011Efficient specification and characterization of surface roughness for extreme ultraviolet optics
Schröder, S.; Trost, M.; Feigl, T.; Duparre, A.; Harvey, J.E.
Conference Paper
2011Impact of surface roughness on scatter losses and the scattering distribution of surfaces and thin film coatings
Schröder, S.; Herffurth, T.; Duparre, A.
Conference Paper
2011Roughness characterization of large EUV mirror optics by laser light scattering
Trost, M.; Schröder, S.; Feigl, T.; Duparre, A.; Tünnermann, A.
Conference Paper
2008Finish assessment of complex surfaces by advanced light scattering techniques
Schröder, S.; Duparre, A.
Conference Paper
2008Fusion multimodaler Daten am Beispiel eines Mikrolinsen-Arrays
Regin, Johan; Westkämper, Engelbert; Schröder, Sven
Journal Article
2002Surface characterization techniques for determining the root-mean-square roughness and power spectral densities of optical components
Duparre, A.; Ferre-Borrull, J.; Gliech, S.; Notni, G.; Steinert, J.; Bennett, J.M.
Journal Article
1998Messung von Mikrostrukturen in einem großen Skalenbereich durch Kombination von Weißlichtinterferometrie und Rasterkraftmikroskopie
Recknagel, R.-J.; Feigl, T.; Duparre, A.; Notni, G.
Conference Paper