Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2020Magnetron sputtering. Determining scaling relations towards real power discharges using 3D particle-in-cell Monte Carlo models
Tonneau, Romain; Pflug, Andreas; Lucas, Stéphane
Journal Article
2020Plasma polymerization of cyclopropylamine in a low-pressure cylindrical magnetron reactor
Mathioudaki, Stella; Vandenabeele, Cédric; Tonneau, Romain; Pflug, Andreas; Tennyson, Jonathan; Lucas, Stéphane
Journal Article
2020Simulation of microparticle motion and contamination in plasma coating systems
Schulz, Philipp; Pflug, Andreas; Kricheldorf, Hans-Ulrich
Journal Article
2014Simulation of linear magnetron discharges in 2D and 3D
Pflug, A.; Siemers, M.; Melzig, T.; Schäfer, L.; Bräuer, G.
Journal Article
2012Parallel particle-in-cell Monte-Carlo algorithm for simulation of gas discharges under PVM and MPI
Schwanke, C.; Pflug, A.; Siemers, M.; Szyszka, B.
Conference Paper
1996Numerical modelling of charged particle motion in electric and magnetic fields to assist magnetron design
Liebig, J.-S.; Frach, P.; Bartzsch, H.; Schulze, D.; Schwanbeck, H.
Conference Paper