Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2012Application of an abrasive-free Cu slurry for MEMS devices
Steible, B.; Stoldt, M.; Tack, M.; Zwicker, G.
Conference Paper
1998Thin-film processing on a thick-film multilayer
Klink, G.; Drost, A.; Schmaus, C.; Bechtold, F.; Feil, M.
Journal Article
1997MBE regrowth of InP on patterned surfaces and its application potential for optoelectronic devices
Paraskevopoulos, A.; Kunzel, H.; Bottcher, J.; Urmann, G.; Hensel, H.J.; Bozbek, A.
Conference Paper
1991In-situ measurement of planarization of wafer topography
Bollmann, D.; Haberger, K.
Conference Paper