Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2018Investigation of application-specific thin film sensor systems with wireless data transmission system
Meyer-Kornblum, E.; Biehl, S.; Paetsch, N.; Bräuer, G.
Journal Article, Conference Paper
2017Size-selective electrostatic sampling and removal of nanoparticles on silicon cantilever sensors for air-quality monitoring
Bertke, M.; Wu, W.; Wasisto, H.S.; Uhde, E.; Peiner, E.
Conference Paper
2017Thin film system with integrated load and temperature sensors for the technical application in deep drawing process
Biehl, S.; Paetsch, N.; Meyer-Kornblum, E.
Conference Paper
2013Novel applications of piezoresistive thin film systems based on hydrogenated carbon
Biehl, S.; Rumposch, C.; Recknagel, C.
Conference Paper
2012Low temperature cofired ceramics (LTCC)-based miniaturized load cells
Lenz, C.; Ziesche, S.; Partsch, U.; Neubert, H.
Conference Paper
2012Thin film sensors for condition monitoring in ball screw drives
Biehl, S.; Staufenbiel, S.; Recknagel, S.; Denkena, B.; Bertram, O.
Conference Paper
2011Integrated piezoresistive position detection for electrostatic driven micro scanning mirrors
Grahmann, J.; Graßhoff, T.; Conrad, H.; Sandner, T.; Schenk, H.
Conference Paper
2010Novel measurement and monitoring system for forming processes based on piezoresistive thin film systems
Albert, A.; Biehl, S.; Staufenbiel, S.; Hauschild, F.
Journal Article
2009Integrated position sensing for 2D microscanning mirrors using the SOI-device layer as the piezoresistive mechanical-elastic transformer
Grahmann, J.; Conrad, H.; Sandner, T.; Klose, T.; Schenk, H.
Conference Paper
2009Novel measurement and monitoring system for forming processes based on piezoresistive thin film systems
Biehl, S.; Staufenbiel, S.; Hauschild, F.
Conference Paper
2008Piezo resistive thin-film sensor as safety system in high speed cutting processes
Biehl, S.; Woitschach, O.; Staufenbiel, S.; Schuller, B.; Wittmer, R.
Conference Paper
2003Nano-structured carbon sensor for simultaneous measurement of load and temperature at mechanically strained surfaces
Biehl, S.; Lüthje, H.; Bandorf, R.
Conference Paper
2002Novel force sensor based on hard diamond-like carbon films
Biehl, S.; Lüthje, H.; Bandorf, R.
Conference Paper
1998Monolithisch integrierter Kraftsensor in Standard-CMOS-Technologie
Dorsch, B.; Hohe, H.P.; Weber, N.
Conference Paper