Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2013Evaluation of photoresist-based nanoparticle removal method for recycling silicon cantilever mass sensors
Wasisto, H.S.; Merzsch, S.; Waag, A.; Uhde, E.; Salthammer, T.; Peiner, E.
Journal Article, Conference Paper
2012Effect of photoresist coating on the reusable resonant cantilever sensors for assessing exposure to airborne nanoparticles
Wasisto, H.S.; Merzsch, S.; Waag, A.; Kirsch, I.; Uhde, E.; Salthammer, T.; Peiner, E.
Journal Article, Conference Paper