Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2020Novel high-contrast phase-shifting masks for EUV interference lithography
Lüttgenau, Bernhard; Brose, Sascha; Danylyuk, Serhiy; Stollenwerk, Jochen; Loosen, Peter
Conference Paper
2001New architecture for laser pattern generators for 130 nanometers and beyond
Ljungblad, U.; Sandström, T.; Buhre, H.; Dürr, P.; Lakner, H.
Conference Paper
2001New laser pattern generator for DUV using a spatial light modulator
Ljungblad, U.; Dauderstädt, U.; Dürr, P.; Sandström, T.; Buhre, H.; Lakner, H.
Journal Article