| | |
|---|
| 2011 | Mask aligner process enhancement by spatial filtering
Vogler, U.; Bich, A.; Voelkel, R.; Stürzebecher, L.; Zeitner, U.D.; Hornung, M. | Conference Paper |
| 2011 | Simulation tools for advanced mask aligner lithography
Bramati, Arianna; Vogler, Uwe; Meliorisz, Balint; Motzek, Kristian; Hornung, Michael; Voelkel, Reinhard | Conference Paper |
| 2005 | Studies of fine pitch patterning by reel-to-reel processes for flexible electronic systems
Drost, A.; Klink, G.; Feil, M.; Bock, K. | Conference Paper |
| 2002 | Design and fabrication of a novel low cost hotplate micro gas sensor
Hildenbrand, J.; Wöllenstein, J.; Spiller, E.; Kühner, G.; Böttner, H.; Urban, G.; Korvink, J.G. | Conference Paper |
| 2002 | Preparation, morphology, and gas-sensing behavior of Cr/sub 2-x/Ti/sub x/O/sub 3+z/ thin films on standard silicon wafers
Wöllenstein, J.; Plescher, G.; Kühner, G.; Böttner, H.; Niemeyer, D.; Williams, D.E. | Journal Article |
| 2000 | Flexible, reliable and simple fabrication of integrated spot size converters with shifting mask technique
Steingrüber, R.; Trommer, D.; Kaiser, R.; Pfeiffer, K.; Tiedke, I. | Conference Paper, Journal Article |
| 1999 | A novel flexible, reliable and easy to use technique for the fabrication of optical spot size converters for InP based PICs
Trommer, D.; Steingrüber, R.; Löffler, R.; Umbach, A. | Conference Paper |
| 1998 | Low-loss polymer waveguide with high thermal stability
Wirges, H.; Keil, N.; Yao, H.H.; Yilmaz, S.; Zawadzki, C.; Bauer, M.; Bauer, J.; Dreyer, C. | Conference Paper |
| 1998 | Mask aligners in advanced packaging
Töpper, M.; Tönnies, D.; Wolf, J.; Engelmann, G.; Reichl, H. | Journal Article |
| 1997 | Micro-optic fabrication using one-level gray-tone lithography
Reimer, K.; Quenzer, H.J.; Jürss, M.; Wagner, B. | Conference Paper |
| 1997 | Multilevel diffractive optical elements fabricated with a single amplitude-phase mask
Pawlowski, E.; Engel, H. | Journal Article |
| 1996 | Fabrication of waveguide tapers by semitransparent mask photolithography
Wengelink, J.; Engel, H. | Conference Paper, Journal Article |
| 1996 | Monolithic pin-HEMT 1.55 mu m photoreceiver on InP with 27 GHz bandwidth
Umbach, A.; Waasen, S. van; Auer, U.; Bach, H.-G.; Bertenburg, R.M.; Breuer, V.; Ebert, W.; Janssen, G.; Mekonnen, G.G.; Passenberg, W.; Schlaak, W.; Schramm, C.; Seeger, A.; Tegude, F.-J.; Unterborsch, G. | Journal Article |
| 1996 | One-level gray-tone design. Mask data preparation and pattern transfer
Reimer, K.; Henke, W.; Quenzer, H.J.; Pilz, W.; Wagner, B. | Conference Paper |
| 1995 | Application of ultraviolet depth lithography for surface micromachining
Löchel, B.; Maciossek, A.; Rothe, M. | Conference Paper |
| 1995 | Diffractive optical elements: Fabrication and measurement of wavelength division multiplexer
Pawlowski, E. | Conference Paper |
| 1995 | Semitransparent mask technique for relief type surface topographies
Wengelink, J.; Engel, H.; Döldissen, W. | Conference Paper, Journal Article |
| 1995 | Surface micro components fabricated by UV depth lithography and electroplating
Löchel, B.; Maciossek, A. | Conference Paper |
| 1995 | Surface micromachining
Löchel, B. | Journal Article |
| 1994 | Diffractive microlenses with antireflection coatings fabricated by thin film deposition
Pawlowski, E.; Engel, H.; Ferstl, M.; Furst, W.; Kuhlow, B. | Journal Article |
| 1994 | Galvanoplated 3D structures for micro systems
Löchel, B.; Maciossek, A.; König, M.; Quenzer, H.J.; Huber, H.-L. | Conference Paper |
| 1994 | Impact of chuck flatness on wafer distortion and stepper overlay - comparison of experimental and FEM results
Stauch, H.; Simon, K.; Scheunemann, H.U.; Huber, H.-L. | Journal Article |
| 1993 | AR-coated arrays of binary lenses for interconnection networks at 1.5 mu m
Ferstl, M.; Kuhlow, B.; Pawlowski, E. | Journal Article, Conference Paper |
| 1993 | Computer generated microlenses with high efficiency
Pawlowski, E.; Ferstl, M.; Kuhlow, B. | Conference Paper |
| 1993 | Galvanoplated 3D structures for micro systems
Löchel, B. | Conference Paper |
| 1993 | Mehrlagenmetallisierung für hochintegrierte mikroelektronische Schaltungen
Vogt, H. | Habilitation |
| 1993 | Thin film deposition: An alternative technique for the fabrication of binary optics with high efficiency
Pawlowski, E. | Conference Paper |
| 1993 | Two dimensional array of AR-coated diffractive microlenses fabricated by thin film deposition
Pawlowski, E.; Engel, H.; Ferstl, M.; Furst, W.; Kuhlow, B. | Conference Paper |
| 1990 | Comparison between surface channel PMOS transistors processed with optical and X-ray lithography with regard to X-ray damage
Naumann, F.; Bernt, H.; Friedrich, D.; Kaatz, A.; Windbracke, W. | Conference Paper |
| 1990 | Simulation of lithographic images and resist profiles
Henke, W.; Czech, G. | Conference Paper |