Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2001Design and fabrication of micromirror arrays for UV-lithography
Lakner, H.; Dürr, P.; Dauderstädt, U.; Doleschal, W.; Amelung, J.
Conference Paper
2000Large deflection micromechanical scanning mirrors for linear scans and pattern generation
Schenk, H.; Dürr, P.; Haase, T.; Kunze, D.; Sobe, U.; Lakner, H.; Kück, H.
Journal Article
1992Generation and evaluation of d-dimensional (d > or = 3) optical shuffle patterns
Giglmayr, J.
Journal Article
1986Microfabrication of planar waveguide devices on LiNbO3
Doldissen, W.; Heidrich, H.; Hoffmann, D.
Conference Paper