Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2011Numerical optimization of illumination and mask layout for the enlargement of process windows and for the control of photoresist profiles in proximity printing
Motzek, Kristian; Partel, Stefan; Vogler, Uwe; Erdmann, Andreas
Conference Paper
2000MicroScan: a DMD based optical surface profiler
Bitte, F.; Dussler, G.; Pfeifer, T.; Frankowski, G.
Conference Paper
1999Microoptical concepts for miniaturised scanners and switches from design to realisation
Göring, R.; Döring, D.; Bücker, P; Götz, B.; Schreiber, P.; Dannberg, P.; Kley, E.-N.; Cumme, M.
Conference Paper
1997Micro-opto-mechanical beam deflectors
Glöckner, S.; Göring, R.; Possner, T.
Journal Article
1997The potential of transmittive microoptical systems for miniaturized scanners, modulators and switches
Göring, R.; Glöckner, S.
Conference Paper