Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2014Ionized sputtering with a pulsed hollow cathode magnetron
Fietzke, Fred; Krätzschmar, Bernd
Journal Article, Conference Paper
2012High rate deposition of mixed oxides by controlled reactive magnetron-sputtering from metallic targets
Bruns, S.; Vergöhl, M.; Werner, O.; Wallendorf, T.
Journal Article, Conference Paper
2011Optical and thin film properties of mixed oxides deposited by pulsed reactive magnetron sputtering
Bruns, S.; Vergöhl, M.
Conference Paper
2011Spatially resolved Langmuir probe measurements of a magnetically enhanced hollow cathode arc plasma
Zimmermann, B.; Fietzke, F.; Möller, W.
Journal Article, Conference Paper
2010High rate deposition of mixed oxides by controlled reactive magnetron-sputtering from metallic targets
Bruns, S.; Vergöhl, M.; Werner, O.; Wallendorf, T.
Conference Paper
2008High power pulsed magnetron sputtering of transparent conducting oxides
Sittinger, V.; Ruske, F.; Werner, W.; Jacobs, C.; Szyszka, B.; Christie, D.J.
Journal Article
2005Corona treatment on polyethylene films at different ambient conditions surface characterization and plasma diagnostics
Kiesow, A.; Teuscher, N.; Heilmann, A.; Meinhardt, J.
Journal Article, Conference Paper
1999Plasma-CVD of TiCN and ZrCN films on light metals
Rie, K.-T.; Wöhle, J.
Journal Article
1996Optical and particle properties of PLD vapour/plasmas of ceramics
Alunovic, M.; Stamm, H.; Aden, M.; Kreutz, E.W.
Journal Article
1995Investigation of plasma produced by laser and electron pulse ablation
Witke, T.; Lenk, A.; Schultrich, B.; Schultheiß, C.
Journal Article
1995Vacuum ultraviolet to visible emission of some pure gases used for plasma processing
Kruse, A.; Fozza, A.; Wertheimer, M.R.
Conference Paper
1995VUV - visible emission from plasmas of high-purity gases and gas mixtures
Kruse, A.; Fozza, A.; Wertheimer, M.R.
Conference Paper