Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2019Radiation testing of optical coatings: Better testing with simulations
Kuhnhenn, Jochen; Steffens, Michael; Baum, Max
Conference Paper
2014Co-sputtering of rugate filters of reduced loss and roughness
Taeschner, Kerstin; Bartzsch, Hagen; Herffurth, Tobias; Schröder, Sven; Duparre, Angela; Frach, Peter
Conference Paper
2012Scratch resistant optical coatings on polymers by magnetron-plasma-enhanced chemical vapor deposition
Täschner, K.; Bartzsch, H.; Frach, P.; Schultheiss, E.
Journal Article, Conference Paper
2011Organic small molecule-based optical coatings
Schulz, U.; Präfke, C.; Munzert, P.; Kaiser, N.
Conference Paper
2011Plasma ion assisted deposition of aluminium oxide and aluminium oxifluoride layers for applications in the ultraviolet spectral range
Stenzel, O.; Gäbler, D.; Wilbrandt, S.; Kaiser, N.; Steffen, H.; Ohl, A.
Journal Article
2011Thin film growth on nanostructured polymer webs for anti-reflection purposes
Munzert, P.; Schulz, U.; Kaiser, N.; Schönberger, W.; Fahland, M.
Journal Article, Conference Paper
2010Scratch resistant optical coatings on polymers by magnetron-PECVD
Taeschner, K.; Bartzsch, H.; Frach, P.; Schultheiß, E.
Conference Paper
2009The correlation between mechanical stress, thermal shift and refractive index in HfO2, Nb2O5, Ta2O5 and SiO2 layers and its relation to the layer porosity
Stenzel, O.; Wilbrandt, S.; Kaiser, N.; Vinnichenko, M.; Munnik, F.; Kolitsch, A.; Chuvilin, A.; Kaiser, U.; Ebert, J.; Jakobs, S.; Kaless, A.; Wuethrich, S.; Treichel, O.; Wunderlich, B.; Bitzer, M.; Grössl, M.
Journal Article
2009Creating anti-reflective nanostructures on polymers by initial layer deposition before plasma etching
Wendling, I.; Munzert, P.; Schulz, U.; Kaiser, N.; Tünnermann, A.
Journal Article, Conference Paper
2009Demonstration of a cavity coupler based on a resonant waveguide grating
Brückner, F.; Friedrich, D.; Clausnitzer, T.; Burmeister, O.; Britzger, M.; Kley, E.-B.; Danzmann, K.; Tünnermann, A.; Schnabel, R.
Journal Article
2009Multifunctional optical coatings on polymers deposited by pulse magnetron sputtering and magnetron enhanced PECVD
Frach, P.; Bartzsch, H.; Taeschner, K.; Liebig, J.; Schultheiß, E.
Conference Paper
2009Properties of cosputtered SiO2-Ta2O5-mixtures
Polenzky, C.; Rickers, C.; Vergöhl, M.
Conference Paper, Journal Article
2009Reactive pulse magnetron sputtered SiOxNy coatings on polymers
Lau, K.; Weber, J.; Bartzsch, H.; Frach, D.P.
Journal Article, Conference Paper
2009Ultra-hydrophobicity through stochastic surface roughness
Flemming, M.; Coriand, L.; Duparre, A.
Book Article
2008Multifunctional high-reflective and antireflective layer systems with easy-to-clean properties
Glöß, D.; Frach, P.; Gottfried, C.; Klinkenberg, S.; Liebig, J.-S.; Hentsch, W.; Liepack, H.; Krug, M.
Conference Paper, Journal Article
2008Optical properties of metal based transparent electrodes on polymer films
Fahland, M.; Vogt, T.; Schönberger, W.; Schiller, N.
Conference Paper, Journal Article
2008Reactive magnetron sputter technologies for precision optical and antireflective coatings on glass and polymer substrates
Bartzsch, H.; Frach, P.; Lau, K.; Weber, J.
Conference Paper
2008Reactive pulse magnetron sputtered SiOxNy coatings on polymers
Lau, K.; Weber, J.; Bartzsch, H.; Frach, P.
Conference Paper
2008Stochastic subwavelength structures on poly(methyl methacrylate) surfaces for antireflection generated by plasma treatment
Leitel, R.; Schulz, U.; Kaiser, N.; Tünnermann, A.
Journal Article
2006In-situ broadband monitoring of heterogeneous optical coatings
Wilbrandt, S.; Kaiser, N.; Stenzel, O.
Journal Article, Conference Paper
2006Investigation of TiO2 based thin films deposited by reactive magnetron sputtering for use at high temperatures
Hunsche, B.; Vergöhl, M.; Ritz, A.
Conference Paper, Journal Article
2006Production of MF and DC-pulse sputtered anti-reflective/anti-static optical interference coatings using a large area in-line coater
Sittinger, V.; Pflug, A.; Werner, W.; Rickers, C.; Vergöhl, M.; Kaiser, A.; Szyszka, B.
Conference Paper, Journal Article
2005Deposition of broadband antireflection coatings on plastic substrates by evaporation and reactive pulse magnetron sputtering
Weber, J.; Schulz, U.; Kaiser, N.; Bartzsch, H.; Frach, P.
Conference Paper
2005Novel optical coating concepts based on nanostructured thin solid films
Stenzel, O.; Heger, P.; Bischoff, M.; Wilbrandt, S.; Kaiser, N.
Conference Paper
2005Optical coating and nanostructuring on plastics
Schulz, U.; Munzert, P.; Kaless, A.; Kaiser, N.
Journal Article
2005Optical coatings - trends and challenges for the present and the future
Kaiser, N.
Journal Article
2005Optical coatings: Trends and challenges
Kaiser, N.; Feigl, T.; Stenzel, O.; Schulz, U.; Yang, M.
Journal Article
2004Graded refractive index layer systems for antireflective coatings and rugate filters deposited by reactive pulse magnetron sputtering
Bartzsch, H.; Lange, S.; Frach, P.; Goedicke, K.
Conference Paper, Journal Article
2004In-situ broadband monitoring of optical coatings
Kaiser, N.; Wilbrandt, S.; Stenzel, O.
Conference Paper
2004Investigation of TiO2 based thin films deposited by reactive magnetron sputtering for use at high temperatures
Hunsche, B.; Vergöhl, M.; Ritz, A.
Conference Paper
2004Ion-assisted deposition processes: Industrial network IntIon
Ehlers, H.; Becker, K.-J.; Beckmann, R.; Beermann, N.; Brauneck, U.; Fuhrberg, P.; Gäbler, D.; Jakobs, S.; Kaiser, N.; Kennedy, M.; König, F.; Laux, S.; Müller, J.C.; Rau, B.; Riggers, W.; Ristau, D.; Schäfer, D.; Stenzel, O.
Conference Paper
2004Production of MF and DC-pulse sputtered precision optical interference coatings using a large area in-line coater
Sittinger, V.; Pflug, A.; Werner, W.; Rickers, C.; Vergöhl, M.; Kaiser, A.; Szyszka, B.
Conference Paper
2003Influences of pulse parameters on properties of optical coatings deposited by reactive pulsed magnetron sputtering
Vanecek, R.; Liebig, J.; Sahm, H.
Conference Paper
2003Inorganic-organic hybrid materials for application in optical devices
Houbertz, R.; Domann, C.; Cronauer, C.; Schmitt, A.; Martin, H.; Park, J.-U.; Fröhlich, L.; Buestrich, R.; Popall, M.; Streppel, U.; Dannberg, P.; Wächter, C.; Bräuer, A.
Journal Article, Conference Paper
2003Methology to evaluate light scatter mechanisms of VUV substrates and coatings
Duparre, A.; Gliech, S.; Hultaker, A.
Book Article
2003New challenges in optical coating design
Stenzel, O.
Conference Paper
2003Silicon nitride films deposited using ECR-PECVD technique for coating InGaAlAs high power laser facets
Sah, R.E.; Rinner, F.; Baumann, H.; Kiefer, R.; Mikulla, M.; Weimann, G.
Journal Article
2003Some fundamentals of optical thin film growth
Kaiser, N.
Book Article
2003Spectrally selective reflecting thin-film filters for laser display technology
Rickers, C.; Vergöhl, M.
Journal Article
2002High-density plasma deposited silicon nitride films for coating InGaAlAs high-power lasers
Sah, R.E.; Rinner, F.; Kiefer, R.; Mikulla, M.; Weimann, G.
Conference Paper
2002High-performance deep-ultraviolet optics for free-electron lasers
Gatto, A.; Thielsch, R.; Heber, J.; Kaiser, N.; Ristau, D.; Günster, S.; Kohlhaas, J.; Marsi, M.; Trovo, M.; Walker, R.; Garzella, D.; Couprie, M.E.; Torchio, P.; Alvisi, M.; Amra, C.
Journal Article
2001Achromatic damage investigations on mirrors for UV-free electron lasers
Gatto, A.; Kaiser, N.; Thielsch, R.; Garzella, D.; Hirsch, M.; Nutarelli, D.; Ninno, G. de; Renault, E.; Couprie, M.E.; Torchio, P.; Alvisi, M.; Albrand, G.; Amra,C.; Marsi, M.; Trovo, M.; Walker, R.; Grewe, M.; Roger, J.P.; Boccara, C
Conference Paper
2001Design optischer Schichtsysteme
Kaiser, N.
Journal Article
2001In-situ monitoring of optical coatings on architectural glass and comparison of the accuracy of the layer thicknesses attainable with ellipsometry and photometry
Vergöhl, M.; Malkomes, N.; Matthee, T.; Bräuer, G.; Richter, U.; Nickol, F.-W.; Bruch, J.
Conference Paper, Journal Article
2001New Applications for Optical Coatings
Kaiser, N.
Book Article
2001Optical Coatings for Ultraviolet Radiation
Kaiser, N.
Book Article
2001Review of fundamentals of thin film growth
Kaiser, N.
Conference Paper
2001Thermoplastics in plasma assisted coating processes
Schulz, U.; Munzert, P.; Kaiser, N.
Conference Paper
2000Real-time control of reactive magnetron-sputter deposited optical filters by in situ spectroscopic ellipsometry
Vergöhl, M.; Malkomes, N.; Matthée, T.; Bräuer, G.
Conference Paper, Journal Article
1998248 nm laser interaction studies on LaF3/MgF2 optical coatings by cross sectional transmission electron microscopy
Kaiser, N.; Czigany, Z.; Adamik, M.
Journal Article
1997248 nm laser interaction studies on LaF3/MgF2 optical coatings by cross sectional transmission electron microscopy
Kaiser, N.; Czigany, Z.; Adamik, M.
Conference Paper
1997ECR-plasma deposited oxygen-free SiN(x) films for low- and high-reflectivity coatings for GaAs based devices
Sah, R.E.; Weimar, U.; Baumann, H.; Wagner, J.; Kiefer, R.; Müller, S.
Conference Paper
1997Influence of substrate cleaning on LIDT of 355 nm HR coatings
Kaiser, N.; Schallenberg, U.B.; Dijon, J.; Garrec, P.
Conference Paper
1997Influence of substrate surface and film roughness on the quality of optical coatings for the UV spectral region
Duparre, A.; Jakobs, S.; Kaiser, N.
Conference Paper
1997Investigation of the absorption induced damage in ultraviolet dielectric thin films
Welsch, E.; Ettrich, K.; Blaschke, H.; Schäfer, D.; Kaiser, N.; Thomsen-Schmidt, P.
Journal Article
1997Properties of SiO2 and Al2O3 films for use in UV-optical coatings
Thielsch, R.; Duparre, A.; Schulz, U.; Kaiser, N.
Conference Paper
1996248 nm laser interaction studies on LaF3/MgF2 optical coatings by mass spectroscopy and x-ray photoelectron spectroscopy
Kaiser, N.; Bodemann, A.; Raupach, L.; Weißbrodt, P.; Hacker, E.
Conference Paper
1996Comparison between 355 nm and 1064 nm damage of high grade dielectric mirror coatings
Kaiser, N.; Bodemann, A.; Kozlowski, M.; Pierce, E.; Stolz, C.
Conference Paper
1996Determination of the refractive indices of highly biaxialanisotropic coatings using guided modes
Kaiser, N.; Jänchen, H.; Endelema, D.; Flory, F.
Journal Article
1996Excimer laser interaction with dielectric thin films
Kaiser, N.; Welsch, E.; Ettrich, K.; Blaschke, H.
Journal Article
1996Interaction of UV-laser-radiation with dielectric thin films
Kaiser, N.; Welsch, E.; Ettrich, K.; Blaschke, H.; Schäfer, D.; Thomsen-Schmidt, P.
Journal Article
1996Interference coatings for the ultraviolet spectral region
Kaiser, N.
Journal Article
1996Laser conditioning of LaF3/MgF2 dielectric coatings at 248 nm
Kaiser, N.; Eva, E.; Mann, K.; Henking, R.; Ristau, D.; Anton, B.; Weißbrodt, P.; Mademann, D.; Raupach, L.; Hacker, E.
Journal Article
1996Optical coatings for UV photolithography systems
Kaiser, N.; Bauer, H.H.; Heller, M.
Conference Paper
1996Perpendicular-incidence photometric ellipsometry of biaxial anisotropic thin films
Kaiser, N.; Zuber, A.; Jänchen, H.
Journal Article
1996Shift-free narrowband filters for the UV-B region
Kaiser, N.; Uhlig, H.; Schallenberg, U.B.
Conference Paper
1995Atomic force microscopy on cross-section of optimal coatings: a new method
Duparre, A.; Ruppe, C.; Pischow, K.A.; Adamik, M.; Barna, P.B.
Journal Article
1995High damage threshold Al2O3/SiO2 dielectric coatings for excimer lasers
Kaiser, N.; Schallenberg, U.; Uhlig, H.; Anton, B.; Kaiser, U.; Mann, K.; Eva, E.
Journal Article
1995Laser conditioning of LaF3/MgF2 dielectric coatings for excimer lasers
Kaiser, N.; Anton, B.; Jänchen, H.; Mann, K.; Eva, E.; Fischer, C.; Henking, R.; Ristau, D.; Weißbrodt, P.; Mademann, D.; Raupach, L.; Hacker, E.
Conference Paper
1995Light scattering of thin dielectric films
Duparre, A.
Book Article
1995A new insight into defect-induced laser damage in UV multilayer coatings
Kaiser, N.; Reichling, M.; Bodemann, A.
Conference Paper
1995Variable-angle spectroscopic ellipsometry for deep UV characterization of dielectric coatings
Zuber, A.; Kaiser, N.; Stehle, J.L.
Journal Article
1994C-adsorption behaviour of thin fluoride films
Kaiser, N.; Kaiser, U.
Journal Article
1994Graded reflectance mirror design with unconventional profile for excimer laser
Kaiser, N.; Schallenberg, U.; Uhlig, H.
Journal Article
1994Micrometer resolved inspection of defects and laser damage sites in UV high-reflecting coatings by photothermal displacement microscopy
Kaiser, N.; Bodemann, A.; Reichling, M.; Welsch, E.
Journal Article
1994Morphology investigations by atomic force microscopy of thin films and substrates for excimer laser mirrors
Kaiser, N.; Duparre, A.; Jakobs, S.
Conference Paper
1994Photothermal microscopy of defects and laser damage morphology in Al2O3/SiO2 dielectric mirror coatings for 248 nm
Kaiser, N.; Reichling, M.; Bodemann, A.; Welsch, E.
Conference Paper
1994Photothermische Mikroskopie zeigt verborgene Defekte in UV-Hochleistungsoptiken
Reichling, M.; Kaiser, N.; Bodemann, A.
Journal Article
1994Resistance of coated optics to UV laser irradiation
Kaiser, N.
Conference Paper
1994Variable-angle spectroscopic ellipsometry for deep UV characterization of dielectric coatings
Kaiser, N.; Zuber, A.; Stehle, J.L.
Conference Paper
1994Very high damage threshold Al2O3/SiO2 dielectric coatings for excimer lasers
Kaiser, N.; Uhlig, H.; Schallenberg, U.B.; Anton, B.; Kaiser, U.; Mann, K.; Eva, E.
Conference Paper
1993Investigation of inhomogenities and impurities in fluoride coatings for high power excimer lasers
Kaiser, N.; Kaiser, U.; Weißbrodt, P.; Mademann, D.; Hacker, E.
Conference Paper
1993Investigation of thin fluoride films for optical applications by surface analytical methods and electron microscopy
Kaiser, N.; Kaiser, U.; Weißbrodt, P.; Mademann, D.; Hacker, E.; Raupach, L.
Journal Article
1993Marketing potential of optical coatings
Kaiser, N.
Journal Article
1993Narrowband interference filters for use in UV-B spectra region
Kaiser, N.; Uhlig, H.
Conference Paper
1993Smooth diamond films for optical applications
Koidl, P.; Wild, C.; Locher, R.; Kohl, R.
Conference Paper
1992Structure of thin fluoride films deposited on amorphous substrates
Kaiser, N.; Kaiser, U.; Weißbrodt, P.; Mademann, U.; Hacker, E.; Müller, H.
Journal Article