Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2011Integrated piezoresistive position detection for electrostatic driven micro scanning mirrors
Grahmann, J.; Graßhoff, T.; Conrad, H.; Sandner, T.; Schenk, H.
Conference Paper
2011Out-of-plane translatory MEMS actuator with extraordinary large stroke for optical path length modulation
Sandner, T.; Grasshoff, T.; Schenk, H.; Kenda, A.
Conference Paper