Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2009Advances in SLM development for microlithography
Dauderstädt, U.; Askebjer, P.; Björnängen, P.; Dürr, P.; Friedrichs, M.; List, M.; Rudloff, D.; Schmidt, J.-U.; Müller, M.; Wagner, M.
Conference Paper
2009Fabrication of large-scale mono-crystalline silicon micro-mirror arrays using adhesive wafer transfer bonding
Zimmer, F.; Niklaus, F.; Lapisa, M.; Ludewig, T.; Bring, M.; Friedrichs, M.; Bakke, T.; Schenk, H.; Wijngaart, W. van der
Conference Paper
2007Charging effects in spatial light modulators based on micromirrors
Dauderstädt, U.; Bakke, T.; Dürr, P.; Sinning, S.; Wullinger, I.; Wagner, M.; Lakner, H.
Conference Paper
2006Large scale, drift free monocrystalline silicon micromirror arrays made by wafer bonding
Bakke, T.; Völker, B.; Friedrichs, M.; Rudloff, D.; Schenk, H.; Lakner, H.
Conference Paper
2006Scanning 2D micromirror with enhanced flatness at high frequency
Wolter, A.; Klose, T.; Hsu, S.; Schenk, H.; Lakner, H.
Conference Paper
2005Mechanical stability of spatial light modulators in microlithography
Dauderstädt, U.; Dürr, P.; Ljungblad, U.; Karlin, T.; Schenk, H.; Lakner, H.
Conference Paper
2005Spatial light modulators with monocrystalline silicon micromirrors made by wafer bonding
Bakke, T.; Friedrichs, M.; Völker, B.; Reiche, M.; Leonardsson, L.; Schenk, H.; Lakner, H.
Conference Paper
2004Application of spatial light modulators for microlithography
Dauderstädt, U.; Dürr, P.; Karlin, T.; Schenk, H.; Lakner, H.
Conference Paper
2004Damping analysis and measurement for a comb-drive scanning mirror
Sandner, T.; Klose, T.; Wolter, A.; Schenk, H.; Lakner, H.
Conference Paper
2004Designing MEMS for manufacturing
Wolter, A.; Herrmann, A.; Yildiz, G.; Schenk, H.; Lakner, H.
Conference Paper
2004Fabrication end-test of the micro scanning mirror
Wolter, A.; Gaumont, E.; Korth, H.; Schenk, H.; Lakner, H.
Conference Paper
2004The MEMS micro scanning mirror for barcode reading: From development to production
Wolter, A.; Schenk, H.; Gaumont, E.; Lakner, H.
Conference Paper
2004Photonic microsystems: An enabling technology for light deflection and modulation
Schenk, H.; Wolter, A.; Dauderstädt, U.; Gehner, A.; Grüger, H.; Drabe, C.; Lakner, H.
Conference Paper
2003Characterization of spatial light modulators for microlithography
Dürr, P.; Dauderstädt, U.; Kunze, D.; Auvert, M.; Bakke, T.; Schenk, H.; Lakner, H.
Conference Paper
2003Operation of spatial light modulators in DUV light
Dauderstädt, U.; Dürr, P.; Krellmann, M.; Karlin, T.; Berzinsh, U.; Leonardsson, L.; Wendrock, H.
Conference Paper
2002Reliability test and failure analysis of optical MEMS
Dürr, P.; Dauderstädt, U.; Kunze, D.; Auvert, M.; Lakner, H.
Conference Paper
2001Untersuchungen zu einem hochauflösenden Flächenlichtmodulator mit einstellbarem Profil einer Flüssigkeitsoberfläche zur optischen Musterwiedergabe
Wolter, A.
Dissertation
2000The moving liquid mirror (MLM) spatial light modulator
Wolter, A.; Lakner, H.; Doleschal, W.; Zimmer, G.
Conference Paper
1999High-precision micro-optic elements by wafer-scale replication on arbitrary substrates
Dannberg, P.; Bierbaum, R.; Erdmann, L.; Krehl, A.; Bräuer, A.
Conference Paper