Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2011Optics contamination studies in support of high-throughput EUV lithography tools
Hill, S.B.; Faradzhev, N.S.; Richter, L.J.; Grantham, S.; Tarrio, C.; Lucatorto, T.B.; Yulin, S.; Schürmann, M.; Nesterenko, V.; Feigl, T.
Conference Paper
2011Study on the lifetime of Mo/Si multilayer optics with pulsed EUV-source at the ETS
Schürmann, M.; Yulin, S.; Nesterenko, V.; Feigl, T.; Kaiser, N.; Tkachenko, B.; Schürmann, M.C.
Conference Paper
2005Optical coatings: Trends and challenges
Kaiser, N.; Feigl, T.; Stenzel, O.; Schulz, U.; Yang, M.
Journal Article