Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2013Characterisation of EUV damage thresholds and imaging performance of Mo/Si multilayer mirrors
Müller, Matthias; Barkusky, Frank; Feigl, Torsten; Mann, Klaus
Conference Paper
2006EUV multilayer optics
Feigl, T.; Yulin, S.; Benoit, N.; Kaiser, N.
Conference Paper, Journal Article
2005Multilayer optics for the EUV and soft X-Rays
Feigl, T.; Yulin, S.; Benoit, N.; Kaiser, N.
Journal Article
2004Carbon buffer layers for smoothing substrates of EUV and X-ray multilayer mirrors
Braun, S.; Bendjus, B.; Foltyn, T.; Menzel, M.; Schreiber, J.; Weißbach, D.
Conference Paper
2001Damage resistant and low stress EUV multilayer mirrors
Feigl, T.; Yulin, S.; Kuhlmann, T.; Kaiser, N.
Conference Paper