
Publica
Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten. | | |
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2013 | Characterisation of EUV damage thresholds and imaging performance of Mo/Si multilayer mirrors Müller, Matthias; Barkusky, Frank; Feigl, Torsten; Mann, Klaus | Conference Paper |
2006 | EUV multilayer optics Feigl, T.; Yulin, S.; Benoit, N.; Kaiser, N. | Conference Paper, Journal Article |
2005 | Multilayer optics for the EUV and soft X-Rays Feigl, T.; Yulin, S.; Benoit, N.; Kaiser, N. | Journal Article |
2004 | Carbon buffer layers for smoothing substrates of EUV and X-ray multilayer mirrors Braun, S.; Bendjus, B.; Foltyn, T.; Menzel, M.; Schreiber, J.; Weißbach, D. | Conference Paper |
2001 | Damage resistant and low stress EUV multilayer mirrors Feigl, T.; Yulin, S.; Kuhlmann, T.; Kaiser, N. | Conference Paper |