Publica
Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten. | | |
|---|
| 2013 | Characterisation of EUV damage thresholds and imaging performance of Mo/Si multilayer mirrors
Müller, Matthias; Barkusky, Frank; Feigl, Torsten; Mann, Klaus | Conference Paper |
| 2006 | EUV multilayer optics
Feigl, T.; Yulin, S.; Benoit, N.; Kaiser, N. | Conference Paper, Journal Article |
| 2005 | Multilayer optics for the EUV and soft X-Rays
Feigl, T.; Yulin, S.; Benoit, N.; Kaiser, N. | Journal Article |
| 2004 | Carbon buffer layers for smoothing substrates of EUV and X-ray multilayer mirrors
Braun, S.; Bendjus, B.; Foltyn, T.; Menzel, M.; Schreiber, J.; Weißbach, D. | Conference Paper |
| 2001 | Damage resistant and low stress EUV multilayer mirrors
Feigl, T.; Yulin, S.; Kuhlmann, T.; Kaiser, N. | Conference Paper |