Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2004Microcontroller modules for the modular MEMS framework MATCH-X
Steck, A.; Muckenhirn, R.; LeNagard, M.
Book Article
2003Packaging solutions for multi-functional and modular MEMS
Stock, A.; Houdir, A.
Conference Paper
2002A field mill based on the modular MEMs framework Match-X
Matuscheck, P.; Evers, J.; Schäfer, W.; Nienhaus, M.; Kleen, S.
Conference Paper
2000From Modular MEMS to a Modular Microfactory - the Hybrid Microfactory?
Großer, V.; Michel, B.; Schünemann, M.; Reichl, H.
Conference Paper