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| 2019 | Temperature calculation in metal substrates during two-photon polymerization
Harnisch, Emely; Venek, Tommy; Nohr, Svenja; König, Niels; Schmitt, Robert | Journal Article |
| 2018 | Slipping domains in water-lubricated microsystems for improved load support
Savio, D.; Falk, K.; Moseler, M. | Journal Article |
| 2015 | Kontinuierliche Fertigung hybrider Mehrlagensysteme
Brecher, Christian; Baum, Christoph; Bastuck, Thomas; Priwisch, Martin | Conference Paper |
| 2014 | Mikrostrukturen für autarke Systeme der Zellkultivierung
Brecher, Christian; Ellinghaus, Jan Moritz; Fleger, Markus; Holzer, Matthias; Meiers, Bernd; Wald, Christian; Wenzel, Christian | Journal Article |
| 2013 | Compact structural health monitoring transducers made by ceramic multilayer technology
Gebhardt, Sylvia; Flössel, Markus; Lieske, Uwe; Klesse, Thomas; Schönecker, Andreas | Journal Article |
| 2012 | Admittance matrix of a trapezoidal piezoelectric heterogeneous bimorph
Schächtele, Jonathan; Goll, Erich; Muralt, Paul; Kaltenbacher, Dominik | Journal Article |
| 2012 | Extraction of ideas from microsystems technology
Thorleuchter, Dirk; Poel, Dirk van den | Conference Paper |
| 2012 | Robust structural health monitoring transducers based on LTCC/PZT multilayer
Gebhardt, S.; Flössel, M.; Schönecker, A.; Lieske, U.; Klesse, T. | Conference Paper |
| 2010 | Piezoelectric generator for self-powered micro actuators
Rödig, T.; Schönecker, A. | Conference Paper |
| 2009 | Implants for epiretinal stimulation of retinitis pigmentosa patients
Trieu, H.-K.; Görtz, M.; Koch, C.; Mokwa, W.; Walter, P. | Conference Paper |
| 2009 | LabOnFoil: Laboratory skin patches and SmartCards based on OLED-on-CMOS and MEMS components
Scholles, M.; Doyle, H.; Merveilles, C.; Ruano-Lopez, J.; Vogel, U. | Conference Paper |
| 2009 | Mikrosystemtechnik
Weimert, B. | Journal Article |
| 2009 | Werkstofftrends: Werkstoffe der Mikrosystemtechnik
Weimert, B.; Reschke, S.; Kohlhoff, J.; Grüne, M. | Journal Article |
| 2008 | MINAM - micro and nano manufacturing at European level
Schäfer, Wolfgang; Zimmer, Klaus; Burke, Theresa; Reinhardt, Andrea | Book Article |
| 2007 | Restoring visual perception using microsystem technologies
Krisch, I.; Hosticka, B.J. | Book Article |
| 2006 | Alignment techniques for the high precision assembly of hybrid microsystems
Brecher, C.; Freundt, M.; Lange, S.; Weinzierl, M. | Conference Paper |
| 2006 | Development of passive alignment techniques for the assembly of hybrid microsystems
Brecher, C.; Weinzierl, M.; Lange, S.C. | Conference Paper |
| 2005 | Micro structuring of metallic moulds and surfaces with a Q-switched thin disc laser
Hollemann, G.; Schubert, A.; Koriath, H.-J. | Conference Paper |
| 2005 | Microsystem for signal processing applications
Frankenstein, B.; Fröhlich, K.-J.; Hentschel, D.; Reppe, G. | Conference Paper |
| 2005 | Requirements engineering für die Automatisierung
Reddig, K. | Conference Paper |
| 2005 | Sensor modules for structural health monitoring and reliability of components
Kröning, M.; Berthold, A.; Meyendorf, N. | Conference Paper |
| 2005 | Smart cameras for medical applications
Krisch, I. | Conference Paper |
| 2005 | Zerstörungsfreie Prüfverfahren für die Elektronik, mikrobearbeitete Strukturen und Baugruppen
Köhler, B.; Schreiber, J.; Bendjus, B.; Herms, M.; Melov, V.G.; Krüger, P.; Meyendorf, N. | Journal Article |
| 2004 | Designing MEMS for manufacturing
Wolter, A.; Herrmann, A.; Yildiz, G.; Schenk, H.; Lakner, H. | Conference Paper |
| 2004 | Match-X Baukastensystem für den Mittelstand
Schäfer, W. | Conference Paper |
| 2004 | Microcontroller modules for the modular MEMS framework MATCH-X
Steck, A.; Muckenhirn, R.; LeNagard, M. | Book Article |
| 2003 | Electrical biochip technology - a tool for microarrays and continuous monitoring
Albers, J.; Grunwald, T.; Nebling, E.; Piechotta, G.; Hintsche, R. | Journal Article |
| 2003 | MICRO.tec 2003: Applications - trends - visions. Proceedings
: Büttgenbach, S.; Westkämper, E. | Conference Proceedings |
| 2002 | A modular approach for simulation-based optimization of MEMS
Schneider, P.; Schneider, A.; Schwarz, P. | Journal Article |
| 2001 | A tool-box approach to the simulation of multi-physics systems
Schwarz, P. | Conference Paper |
| 2000 | Direct control of cutting tools by novel microtechniques
Lüthje, H.; Löhken, T.; Böttcher, R. | Conference Paper |
| 1999 | Möglichkeiten und Grenzen der Mikrozerspanung
Wenda, A.; Beck, V.; Hüntrup, V.; Meisel, M.; Rothenburg, M.; Rübenach, O.; Schmütz, J.; Schwietering, C.; Gäbler, J. | Journal Article |
| 1998 | A modeling approach to include mechanical microsystem components into the system simulation
Neul, R.; Becker, U.; Lorenz, G.; Schwarz, P.; Haase, J.; Wünsche, S. | Conference Paper |
| 1997 | Microsystem design using simulator coupling
Wünsche, S.; Clauß, C.; Schwarz, P.; Winkler, F. | Conference Paper |
| 1996 | Coupled finite element and network simulation for microsystem components
Eccardt, P.-C.; Knoth, M.; Ebest, G.; Landes, H.; Clauß, C.; Wünsche, S. | Conference Paper |
| 1996 | A micro fluid system for liquid dosage and nebulization
Kluge, S.; Woias, P.; Paneva, R.; Hermes, T.; Temmel, G. | Conference Paper |
| 1996 | A micro mechanical system for liquid dosage and nebulization
Kluge, S.; Hermes, T.; Paneva, R.; Temmel, G.; Woias, P. | Conference Paper |
| 1996 | A micro mechanical system for liquid dosage and nebulization
Temmel, G.; Hermes, T.; Paneva, R.; Kluge, S.; Woias, P. | Conference Paper |
| 1996 | Simulator coupling for electro-thermal simulation of integrated circuits
Wünsche, S. | Conference Paper |
| 1995 | ASICs in Mikrosystemen. Beispiele aus dem bayerischen Forschungsverbund FORMIKROSYS
Weber, N.; Baureis, P.; Schlag, U. | Conference Paper |
| 1995 | Micro Materials, Micro Mat 1995. Abstracts
: Michel, B.; Winkler, T. | Conference Proceedings |
| 1995 | Processing of polymer surfaces by laser radiation
Kreutz, E.W.; Frerichs, H.; Stricker, J.; Wesner, D.A. | Journal Article |
| 1994 | Advantages and potential of SOI structures for smart sensors
Vogt, H. | Conference Paper |
| 1994 | Ein monolithisch integriertes CMOS-Drucksensorsystem mit Temperaturkompensation und On-Chip gespeicherten Kalibrationsdaten
Hammerschmidt, D.; Schnatz, F.V.; Brockherde, W.; Hosticka, B.J.; Schlichting, V.; Obermeier, E. | Conference Paper |
| 1994 | Reduction of heat loss of silicon membranes by the use of trench etching techniques
Werno, J.; Mokwa, W.; Vogt, H.; Kersjes, R.A. | Journal Article |
| 1994 | Temperaturkompensation von Sensorsystemen durch CMOS-Schaltungen
Hammerschmidt, D.; Sprotte, A.; Schnatz, F.V.; Brockherde, W.; Hosticka, B.J.; Dura, H.-G.; Dudaicevs, H.; Mokwa, W. | Conference Paper |
| 1993 | A CMOS piezoresistive pressure sensor with on-chip programming and calibration
Brockherde, W.; Hammerschmidt, D.; Hosticka, B.J.; Obermeier, E.; Schnatz, F.V. | Conference Paper |
| 1993 | Digital programmable pressure sensor with on-chip CMOS signal processing and data storage
Schlichting, V.; Hammerschmidt, D.; Hosticka, B.J.; Obermeier, E.; Pollak-Diener, G.; Schnatz, F.V. | Conference Paper |
| 1993 | Intelligente Sensoren auf dem Weg zum ASIC
Vogt, H. | Journal Article |
| 1993 | Intelligente Sensorsysteme auf Siliziumbasis
Mokwa, W. | Conference Paper |
| 1993 | A new microstructured silicon substrate for ultrathin gas-sensitive films
Schütze, A.; Weber, U.; Zacheja, J.; Kohl, D.; Mokwa, W.; Rospert, M.; Werno, J. | Conference Paper |
| 1993 | Reduction of heat loss of silicon membranes by the use of trench etching techniques
Werno, J.; Mokwa, W.; Vogt, H.; Kersjes, R.A. | Conference Paper |
| 1993 | Silizium-Mikrosysteme für medizinische Anwendungen
Mokwa, W. | Conference Paper |
| 1992 | Circuit and system design for silicon microsensors
Hosticka, B.J. | Conference Paper |
| 1992 | Integrated sensor electronics, the link between sensor and system
Brockherde, W.; Hosticka, B.J. | Conference Paper |
| 1990 | Silicon microsystems
Brockherde, W.; Hosticka, B.J.; Manoli, Y.; Mokwa, W. | Conference Paper |