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2018 | Novel method for thermal characterization of MEMS Gao, Haitao; Amann, Johannes; Lyu, Xuemeng; Wöllenstein, Jürgen; Palzer, Stefan | Journal Article |
2015 | Sensor network with energy efficient and low-cost gas sensor nodes for the detection of hazardous substances in the event of a disaster Rademacher, Sven; Schmitt, Katrin; Mengers, Martin; Wöllenstein, Jürgen | Conference Paper |
2009 | Actuators to be integrated in low temperature cofired ceramics (LTCC) microfluidic systems Klumbies, H.; Partsch, U.; Goldberg, A.; Gebhardt, S.; Keitel, U.; Neubert, H. | Conference Paper |
2009 | A novel platform technology for the detection of genetic variations by surface plasmon resonance Mertig, M.; Bonsch, M.; Katzschner, B.; Voigt, J.; Sonntag, F.; Schilling, N.; Klotzbach, U.; Danz, N.; Begemann, S.; Herr, A.; Jung, M. | Conference Paper |
2009 | Werkstofftrends: Werkstoffe der Mikrosystemtechnik Weimert, B.; Reschke, S.; Kohlhoff, J.; Grüne, M. | Journal Article |
2007 | PZT thick films for sensor and actuator applications Gebhardt, S.; Seffner, L.; Schlenkrich, F.; Schönecker, A. | Journal Article, Conference Paper |
2005 | Laser-assisted structuring for the fabrication of thin film sensors on complex 3D-surfaces Biehl, S.; Lüthje, H.; Bandorf, R. | Conference Paper |
2004 | Laser-patterning of thin films deposited on complex surfaces for the fabrication of micro-sensors Biehl, S.; Lüthje, H. | Conference Paper |
2004 | Wear resistant thin film sensors for monotoring force and temperature in the track of ball bearings Biehl, S.; Lüthje, H. | Conference Paper |
2000 | On-chip programmable monolithic integrated pressure sensor for high pressure applications Trieu, H.K.; Köster, O.; Knier, M.; Kappert, H.; Mowka, W. | Conference Paper |
1998 | CMOS sensor systems Hosticka, B.J. | Conference Paper |
1998 | Efficient design and optimizatíon of MEMS by integrating commercial simulation tools Nagler, O.; Trost, M.; Hillerich, B.; Kozlowski, F. | Conference Paper |
1997 | Microsensor techniques for cardiovascular systems Kersjes, R.A.; Mokwa, W. | Journal Article |
1990 | Silicon microsystems Brockherde, W.; Hosticka, B.J.; Manoli, Y.; Mokwa, W. | Conference Paper |