Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2018Novel method for thermal characterization of MEMS
Gao, Haitao; Amann, Johannes; Lyu, Xuemeng; Wöllenstein, Jürgen; Palzer, Stefan
Journal Article
2015Sensor network with energy efficient and low-cost gas sensor nodes for the detection of hazardous substances in the event of a disaster
Rademacher, Sven; Schmitt, Katrin; Mengers, Martin; Wöllenstein, Jürgen
Conference Paper
2009Actuators to be integrated in low temperature cofired ceramics (LTCC) microfluidic systems
Klumbies, H.; Partsch, U.; Goldberg, A.; Gebhardt, S.; Keitel, U.; Neubert, H.
Conference Paper
2009A novel platform technology for the detection of genetic variations by surface plasmon resonance
Mertig, M.; Bonsch, M.; Katzschner, B.; Voigt, J.; Sonntag, F.; Schilling, N.; Klotzbach, U.; Danz, N.; Begemann, S.; Herr, A.; Jung, M.
Conference Paper
2009Werkstofftrends: Werkstoffe der Mikrosystemtechnik
Weimert, B.; Reschke, S.; Kohlhoff, J.; Grüne, M.
Journal Article
2007PZT thick films for sensor and actuator applications
Gebhardt, S.; Seffner, L.; Schlenkrich, F.; Schönecker, A.
Journal Article, Conference Paper
2005Laser-assisted structuring for the fabrication of thin film sensors on complex 3D-surfaces
Biehl, S.; Lüthje, H.; Bandorf, R.
Conference Paper
2004Laser-patterning of thin films deposited on complex surfaces for the fabrication of micro-sensors
Biehl, S.; Lüthje, H.
Conference Paper
2004Wear resistant thin film sensors for monotoring force and temperature in the track of ball bearings
Biehl, S.; Lüthje, H.
Conference Paper
2000On-chip programmable monolithic integrated pressure sensor for high pressure applications
Trieu, H.K.; Köster, O.; Knier, M.; Kappert, H.; Mowka, W.
Conference Paper
1998CMOS sensor systems
Hosticka, B.J.
Conference Paper
1998Efficient design and optimizatíon of MEMS by integrating commercial simulation tools
Nagler, O.; Trost, M.; Hillerich, B.; Kozlowski, F.
Conference Paper
1997Microsensor techniques for cardiovascular systems
Kersjes, R.A.; Mokwa, W.
Journal Article
1990Silicon microsystems
Brockherde, W.; Hosticka, B.J.; Manoli, Y.; Mokwa, W.
Conference Paper