Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2006Development of functional ceramic films for nano and microsystems technology
Schönecker, A.; Gebhardt, S.; Schlenkrich, F.; Endler, I.; Mayer-Uhma, T.; Uhlig, S.
Conference Paper
1999Design and sensitivity optimization of vibration sensors for tool state monitoring
Thomas, J.S.; Kuhnhold, R.; Ryssel, H.
Conference Paper
1998Efficient design and optimizatíon of MEMS by integrating commercial simulation tools
Nagler, O.; Trost, M.; Hillerich, B.; Kozlowski, F.
Conference Paper
1998Thermomechanical behavior of metal contacts and interconnects for information technology
Kaulfersch, E.; Schubert, A.; Michel, B.
Conference Paper
1997Efficient design and optimizatíon of MEMS by integrating commercial simulation tools
Nagler, O.; Trost, M.; Hillerich, B.; Kozlowski, F.
Conference Paper
1997Micromechanical relay with electrostatic actuation
Schiele, I.; Hillerich, B.; Kozlowski, F.; Evers, C.
Conference Paper
1996Switchable Fresnel zone lenses for optical interconnections
Ferstl, M.; Frisch, A.-M.
Conference Paper
1995Surface micro components fabricated by UV depth lithography and electroplating
Löchel, B.; Maciossek, A.
Conference Paper
1994Galvanoplated 3D structures for micro systems
Löchel, B.; Maciossek, A.; König, M.; Quenzer, H.J.; Huber, H.-L.
Conference Paper
1993Fabrication of magnetic microstructures by using thick layer resists
Löchel, B.; Maciossek, A.; König, M.; Huber, H.-L.; Bauer, G.
Conference Paper
1993Galvanoplated 3D structures for micro systems
Löchel, B.
Conference Paper
1993Silicon microsystems
Heuberger, A.
Conference Paper