Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2019Fabrication of high aspect-ratio surface micro patterns on stainless steel using high-speed direct laser interference patterning
Lang, Valentin; Voisiat, Bogdan; Kunze, Tim; Lasagni, Andrés-Fabián
Journal Article
2018Tool System for UV induced micro moulding of biomedical disposables
Edelmann, Jan; Gärtner, Eric; Eckert, Udo; Griebel, Jan
Conference Paper
2017Compensation of scanner based inertia for laser structuring processes
Pothen, Mario; Winands, Kai; Klocke, Fritz
Journal Article
2016Technologies for micro- and precision machining applications
Kugler, Till; Blau, Peter; Edelmann, Jan; Eckert, Udo; Koriath, Hans-Joachim; Bogachev, Yuri P.; Sakharova, Olga P.
Presentation
2015Dislocation injection in strontium titanate by femtosecond laser pulses
Titus, M.S.; Echlin, M.P.; Gumbsch, P.; Pollock, T.M.
Journal Article
2014Simultaneously spatially and temporally focusing light for tailored ultrafast micro-machining
Thomas, Jens U.; Block, Erica; Greco, Michael; Meier, Amanda; Durfee, Charles G.; Squier, Jeffrey A.; Nolte, Stefan; Tünnermann, Andreas
Conference Paper
2014Ultrashort pulse lasers for precise processing: Overview on a current German research initiative
Nolte, Stefan
Conference Paper
2013Influence of ambient pressure on the hole formation process in ultrashort pulse laser deep drilling
Döring, Sven; Richter, Sören; Ullsperger, Tobias; Tünnermann, Andreas; Nolte, Stefan
Conference Paper
2012Influence of pulse duration on the hole formation during short and ultrashort pulse laser deep drilling
Döring, Sven; Richter, Sören; Tünnermann, Andreas; Nolte, Stefan
Conference Paper
2012Parallel high speed machining with a new additional HSC spindle for machine tools
Harpaz, Oren; Books, Baruch; Schwaar, Michael; Schubert, Andreas; Eckert, Udo
Conference Paper
2011In-situ observation of the hole formation during deep drilling with ultrashort laser pulses
Döring, S.; Richter, S.; Nolte, S.; Tünnermann, A.
Conference Paper
2011Ultrasonic assistance and nonconductive materials: Shifting the boundaries of micro-EDM
Schubert, Andreas; Zeidler, Henning; Hackert-Oschätzchen, Matthias; Schneider, Jörg
Conference Paper
2010An investigation of micro-machining parameters for fabrication ear-implants from titanium
Fliz, S.; Eckert, U.; Pinternagel, S.; Schubert, A.; Ozdoganlar, B.
Conference Paper
2010Laser micro structuring of high-stressed embossing dies
Schubert, A.; Groß, S.; Edelmann, J.; Schulz, B.
Conference Paper
2009Milling strategies to improve accuracy and surface quality of microstructured parts
Neugebauer, Reimund; Schubert, A.; Schneider, J.; Eckert, U.
Conference Paper
2008Influence of special milling strategies on accuracy and surface quality of microstructured forms and prototypes
Schubert, A.; Schneider, J.; Eckert, U.
Conference Paper
2008Machine tool for combines micro milling an laser ablation processes
Eßmann, J.; Uhlmann, E.; Wissner, R.; Pauli, A.
Conference Paper
2008Potentials of electron beam technology in photovoltaic applications
Morgner, H.; Metzner, C.
Conference Paper
2007Elektrochemische Mikrostrukturierung mit hoher Abtragsrate und hoher Abbildgenauigkeit
Wünsch, D.
Thesis
2007A new type of 3D micro machining system
Schubert, A.; Schulz, B.; Blank, G.
Conference Paper
2006Entwicklung intelligenter, maschinennaher Dienste für die Mikrobearbeitung
Stolz, M.F.
Dissertation
2006Laser helical drilling of silicon wafers with ns to fs pulses
Kaspar, J.; Luft, A.; Nolte, S.; Will, M.; Beyer, E.
Journal Article
2006Prozessnahe Geometrievermessung von Mikrostrukturen in Höchstpräzisionsbearbeitungsmaschinen
Böhme, J.
Thesis
2004Designing MEMS for manufacturing
Wolter, A.; Herrmann, A.; Yildiz, G.; Schenk, H.; Lakner, H.
Conference Paper
2003A novel single chip thin film metal oxide array
Wöllenstein, J.; Plaza, J.A.; Cane, C.; Min, Y.; Böttner, H.; Tuller, H.L.
Journal Article, Conference Paper
2001Debris-reduced laser machining of polymeric waveguides for optoelectronic applications
Berden, T.; Kreutz, E.W.; Poprawe, R.
Conference Paper
2001Microscopic formtesting of large area microstructures by means of formtesting interferometry
Schneefuß, K.; Pfeifer, T.
Conference Paper
2001A novel methodology for the manufacturability of robust CMOS semiconductor gas sensor arrays
Götz, A.; Gracia, I.; Plaza, J.A.; Cane, C.; Roetsch, P.; Böttner, H.; Seibert, K.
Journal Article
2001Precision machine tools
Weck, M.; Hilbing, R.; Peschke, C.
Conference Paper
2000Chemical vapour deposition diamond coated microtools for grinding, milling and drilling
Gäbler, J.; Schäfer, L.; Westermann, H.
Journal Article
2000CVD diamond tools - fabrication methods and tool applications
Schäfer, L.; Gäbler, J.
Conference Paper
2000On-chip programmable monolithic integrated pressure sensor for high pressure applications
Trieu, H.K.; Köster, O.; Knier, M.; Kappert, H.; Mowka, W.
Conference Paper
1999High-accuracy micromachining of ceramics by frequency-tripled Nd:YAG-lasers
Hellrung, D.; Yeh, L.-Y.; Depiereux, F.; Gillner, A.; Poprawe, R.
Conference Paper
1999Möglichkeiten und Grenzen der Mikrozerspanung
Wenda, A.; Beck, V.; Hüntrup, V.; Meisel, M.; Rothenburg, M.; Rübenach, O.; Schmütz, J.; Schwietering, C.; Gäbler, J.
Journal Article
1998Fundamental investigations of micromachining by nano- and picosecond laser radiation
Jandeleit, J.; Horn, A.; Weichenhain, R.; Kreutz, E.W.; Poprawe, R.
Journal Article
1998On-chip microsystems for medical applications
Mokwa, W.; Schnakenberg, U.
Conference Paper
1998Surface-micromachined electrostatic microrelay
Schiele, I.; Huber, J.; Hillerich, B.; Kozlowski, F.
Conference Paper
1997Infrared micromirror array with large pixel size and large deflection angle
Wagner, B.; Reimer, K.; Maciossek, A.; Hofmann, U.
Conference Paper
1997Micro-optic fabrication using one-level gray-tone lithography
Reimer, K.; Quenzer, H.J.; Jürss, M.; Wagner, B.
Conference Paper
1997Micromachining by picosecond laser radiation
Jandeleit, J.; Rußbüldt, P.; Kreutz, E.W.; Treusch, H.G.
Conference Paper
1997Micromechanical relay with electrostatic actuation
Schiele, I.; Hillerich, B.; Kozlowski, F.; Evers, C.
Conference Paper
1996Dry etching and micromachining of precision Silicon components
Kreutz, E.W.; Pfleging, W.; Jandeleit, J.; Urbasch, G.
Conference Paper
1996One-level gray-tone design. Mask data preparation and pattern transfer
Reimer, K.; Henke, W.; Quenzer, H.J.; Pilz, W.; Wagner, B.
Conference Paper
1996Switchable Fresnel zone lenses for optical interconnections
Ferstl, M.; Frisch, A.-M.
Conference Paper
1995Application of ultraviolet depth lithography for surface micromachining
Löchel, B.; Maciossek, A.; Rothe, M.
Conference Paper
1995Local material removal by focused ion beam milling and etching
Lipp, S.; Frey, L.; Franz, G.; Demm, E.; Petersen, S.; Ryssel, H.
Journal Article
1995Novel potentiometric silicon sensor for medical devices
Schnakenberg, U.; Lisec, T.; Hintsche, R.; Kuna, I.; Uhlig, A.; Wagner, B.
Conference Paper
1995Surface micro components fabricated by UV depth lithography and electroplating
Löchel, B.; Maciossek, A.
Conference Paper
1995Surface micromachining
Löchel, B.
Journal Article
1994Charakterisierung ultrapräzisionsbearbeiteter Materialien mittels Rastersonden-Mikroskopie
Rabe, U.; Arnold, W.; Scherer, V.; Riemer, O.; Preuß, W.; Brinksmeier, E.
Conference Paper
1994Charakterisierung ultrapräzisionsbearbeiteter Materialien mittels Rastersonden-Mikroskopie (ASPE)
Rabe, U.; Arnold, W.; Scherer, V.; Fechner, R.; Schindler, A.; Riemer, O.; Preuß, W.; Brinksmeier, E.
Conference Paper
1990An electrohydrodynamic micropump
Richter, A.; Sandmaier, H.
Conference Paper
1990Electrohydrodynamic micropumps
Richter, A.
Conference Paper
1990Removal and drilling of metals by eximer laser radiation.
Schulze, W.; Kreutz, E.W.; Poprawe, R.
Conference Paper
1989The geometrical and dynamical behaviour of ultraprecision diamond turning machines set limits to the workpiece accuracy
Weck, Manfred; Hartel, R.; Bispink, T.
Conference Paper
1987Checking surface modulation on metaloptics by analysing ultraprecision machines
Weck, Manfred; Modemann, K.
Conference Paper