Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2009Advances in SLM development for microlithography
Dauderstädt, U.; Askebjer, P.; Björnängen, P.; Dürr, P.; Friedrichs, M.; List, M.; Rudloff, D.; Schmidt, J.-U.; Müller, M.; Wagner, M.
Conference Paper
2009Transmission physics and consequences for materials selection, manufacturing, and applications
Krell, A.; Hutzler, T.; Klimke, J.
Journal Article
2007Transparent ceramics for structural applications. Pt. 2: Fields of Applications
Krell, A.; Hutzler, T.; Klimke, J.
Journal Article
2007Transparent ceramics: Transmission physics and consequences for materials selection, manufacturing, and applications
Krell, A.; Hutzler, T.; Klimke, J.
Conference Paper
2005Determination of scattering losses in ArF* excimer laser all-dielectric mirrors for 193 nm microlithography application
Rudisill, J.; Duparre, A.; Schröder, S.
Conference Paper
2003Early mask making during the 1960's in Dresden
Becker, H.W.
Conference Paper
2002Optics developments in the VUV-soft X-ray spectral region
Feigl, T.; Heber, J.; Gatto, A.; Kaiser, N.
Journal Article