Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2016Enhanced actuation of nanocrystalline diamond microelectromechanical disk resonators with AlN layers
Yoshikawa, T.; Reusch, M.; Holc, K.; Iankov, D.; Zürbig, V.; Zukauskaité, A.; Nebel, C.E.; Ambacher, O.; Lebedev, V.
Journal Article
2013Algorithmic approaches for system-level simulation of MEMS and aspects of cosimulation
Schneider, Peter; Clauß, Christoph; Donath, Ulrich; Elst, Günter; Enge-Rosenblatt, Olaf; Uhle, Thomas
Book Article
2010AlGaN/GaN based heterostructures for MEMS and NEMS applications
Cimalla, V.; Röhlig, C.-C.; Lebedev, V.; Ambacher, O.; Tonisch, K.; Niebelschütz, F.; Brueckner, K.; Hein, M.A.
Conference Paper
2009Performance modification of SiC MEMS
Niebelschütz, F.; Brueckner, K.; Cimalla, V.; Hein, M.A.; Pezoldt, J.
Conference Paper, Journal Article
2009Wide band gap based MEMS for harsh environment applications
Cimalla, V.; Lebedev, V.; Röhlig, C.-C.; Ambacher, O.; Niebelschütz, F.; Tonisch, K.; Pezoldt, J.; Brueckner, K.; Hein, M.
Conference Paper
2008Ultracompact laser projection systems based on two-dimensional resonant microscanning mirrors
Scholles, M.; Bräuer, A.; Frommhagen, K.; Gerwig, C.; Lakner, H.; Schenk, H.; Schwarzenberg, M.
Journal Article
2007Surface technology with cold microplasmas
Klages, C.-P.; Hinze, A.; Lachmann, K.; Berger, C.; Borris, J.; Eichler, M.; Hausen, M. von; Zänker, A.; Thomas, M.
Conference Paper, Journal Article
2000Monolithic integrated surface micromachined absolute pressure sensors with programmable linearization and temperature compensation
Köster, O.; Trieu, H.-K.; Knier, M.; Kappert, H.; Schmidt, M.; Mokwa, W.
Conference Paper