Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2009Actuators to be integrated in low temperature cofired ceramics (LTCC) microfluidic systems
Klumbies, H.; Partsch, U.; Goldberg, A.; Gebhardt, S.; Keitel, U.; Neubert, H.
Conference Paper
2009Werkstofftrends: Werkstoffe der Mikrosystemtechnik
Weimert, B.; Reschke, S.; Kohlhoff, J.; Grüne, M.
Journal Article
2007PZT thick films for sensor and actuator applications
Gebhardt, S.; Seffner, L.; Schlenkrich, F.; Schönecker, A.
Journal Article, Conference Paper
2004Design, fabrication and characterization of a microactuator for nebulization of fluids
Yasenov, N.; Berberich, S.E.; Frey, L.; Ryssel, H.
Conference Paper
2001Novel equipment for friction force measurement on MEMS and micro components
Schmidt, M.; Wortmann, A.; Lüthje, H.; Büttgenbach, S.
Conference Paper
1998Efficient design and optimizatíon of MEMS by integrating commercial simulation tools
Nagler, O.; Trost, M.; Hillerich, B.; Kozlowski, F.
Conference Paper
1998Surface-micromachined electrostatic microrelay
Schiele, I.; Huber, J.; Hillerich, B.; Kozlowski, F.
Conference Paper
1997Infrared micromirror array with large pixel size and large deflection angle
Wagner, B.; Reimer, K.; Maciossek, A.; Hofmann, U.
Conference Paper
1990Silicon microsystems
Brockherde, W.; Hosticka, B.J.; Manoli, Y.; Mokwa, W.
Conference Paper