Fraunhofer-Gesellschaft

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Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2018FO-WLP multi-DOF inertial sensor for automotive applications
Kuisma, Heikki; Cardoso, Andre; Mäntyoja, Nikolai; Rosenkrantz, Rüdiger; Nurmi, Sami; Gall, Martin
Conference Paper
2005Micro-opto-electro-mechanical systems technology and its impact on photonic applications
Schenk, H.; Wolter, A.; Dauderstädt, U.; Gehner, A.; Lakner, H.
Journal Article
2005Studies on three-dimensional moulding, bonding and assembling of low-temperature-cofired ceramics for MEMS and MST applications
Khanna, P.K.; Hornbostel, B.; Burgard, M.; Schäfer, W.; Dorner, J.
Journal Article
2004MEMS and microsystems based on low-temperature cofired ceramics: A cost analysis
Khanna, P.K.; Hornbostel, B.; Jäger, T.; Schäfer, W.
Journal Article
2004Microcontroller modules for the modular MEMS framework MATCH-X
Steck, A.; Muckenhirn, R.; LeNagard, M.
Book Article
2004Miniature pressure sensor and micromachined actuator structure based on low-temperature-cofired ceramics and piezoelectric material
Khanna, P.K.; Hornbostel, B.; Grimme, R.; Schäfer, W.; Dorner, J.
Journal Article
2003Methoden zur lokalen Funktionalisierung von Oberflächen
Werner, D.; Grimme, R.
Conference Paper
1994Mikroelektronik, eine Schlüsseltechnologie im Umweltschutz
Angerer, G.
Book Article
1990Elektrohydrodynamische Mikropumpe für elektromechanische Systeme
Richter, A.
Conference Paper