Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2010Characterization of the scattering effect of complex mask geometries with surface roughness
Rahimi, Z.; Erdmann, A.; Pflaum, C.
Conference Paper
2010Rigorous EMF simulation of absorber shape variations and their impact on lithographic processes
Rahimi, Z.; Erdmann, A.; Evanschitzky, P.; Pflaum, C.
Conference Paper
2002Anomalous refraction and diffraction in discrete optical systems
Pertsch, T.; Zentgraf, T.; Peschel, U.; Bräuer, A.; Lederer, F.
Journal Article
2002Enhancements in rigorous simulation of light diffraction from phase-shift masks
Erdmann, A.; Kachwala, N.
Conference Paper
1998Beam generation and beam shaping for a 1.5 kW diffusion-cooled annular CO2 laser
Habich, U.; Heursch, A.; Plum, H.-D.; Poprawe, R.
Conference Paper
1996Switchable Fresnel zone lenses for optical interconnections
Ferstl, M.; Frisch, A.-M.
Conference Paper
1995Diffractive optical elements: Fabrication and measurement of wavelength division multiplexer
Pawlowski, E.
Conference Paper
1995Full-colour diffraction-based optical system for light-valve projection displays
Roder, H.; Ehrke, H.-J.; Gerhard-Multhaupt, R.; Ipp, E.; Menzel, I.
Journal Article