Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2011Comparison of optical and tactile layer thickness measurements of polymers and metals on silicon or SiO2
Brand, U.; Beckert, E.; Beutler, A.; Dai, G.; Stelzer, C.; Hertwig, A.; Klapetek, P.; Koglin, J.; Thelen, R.; Tutsch, R.
Journal Article
2005Nondestructive and contactless determination of layer and coating thickness
Sklarczyk, C.; Netzelmann, U.; Kreier, P.; Gebhardt, W.
Conference Paper
1999Interference phenomena at trasparent layers in glow discharge optical emission spectrometry
Hoffmann, V.; Kurt, R.; Kämmer, K.; Thielsch, R.; Wirth, T.; Beck, U.
Journal Article
1998Noncontacting measurement of thickness of thin titanium silicide films using spectroscopic ellipsometry
Kal, S.; Kasko, I.; Ryssel, H.
Journal Article
1997Large- and selective-area LP-MOVPE growth of InGaAsP-based bulk and QW layers under nitrogen atmosphere
Roehle, H.; Schroeter-Janssen, H.; Kaiser, R.
Journal Article
1996Combination of selective etching and AFM imaging for the thickness analysis of AlGaAs/GaAs heterostructures
Müller, S.; Weyer, J.L.; Köhler, K.; Jantz, W.; Frigeri, C.
Conference Paper
1987Theoretical analysis of an electrically addressed viscoelastic spatial light modulator
Tepe, R.
Journal Article