Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2020Low-Resistance Ohmic Contact Formation by Laser Annealing of N-Implanted 4H-SiC
Hellinger, Carsten; Rusch, Oleg; Rommel, Mathias; Bauer, Anton J.; Erlbacher, Tobias
Conference Paper
2020Reducing On-Resistance for SiC Diodes by Thin Wafer and Laser Anneal Technology
Rusch, Oleg; Hellinger, Carsten; Moult, Jonathan; Corcoran, Yunji; Erlbacher, Tobias
Conference Paper
2019Systematic Comparison of Thermal Annealing and Laser Treatment of TiO2 Thin Films Prepared by Sol-Gel Processing
Wesang, Kristin; Hohnholz, Arndt; Jahn, Rainer; Steenhusen, Sönke; Löbmann, Peer
Journal Article
2013Dopant dynamics and defects evolution in implanted silicon under laser irradiations: A coupled continuum and kinetic Monte Carlo approach
Fisicaro, G.; Pelaz, L.; Aboy, M.; Lopez, P.; Italia, M.; Huet, K.; Cristiano, F.; Essa, Z.; Yang, Q.; Bedel-Pereira, E.; Hackenberg, M.; Pichler, P.; Quillec, M.; Taleb, N.; La Magna, A.
Conference Paper