Fraunhofer-Gesellschaft

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Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2003CMOS compatible capacitive differential pressure sensors
Weyers, S.
Conference Paper
2002Fully CMOS compatible capacitive differential pressure sensors with on-chip programmabilities and temperature compensation
Trieu, H.-K.; Kordas, N.; Mokwa, W.
Conference Paper
2001Mikromechanische Drucksensoren
Trieu, H.-K.
Journal Article
1993CMOS-kompatibler kapazitiver Siliziumdrucksensor in Oberflächenmikromechanik
Kandler, M.
Dissertation
1992A CMOS sensor and signal conversion chip for monitoring arterial blood pressure and temperature
Kandler, M.; Manoli, Y.; Mokwa, W.; Spiegel, E.
Conference Paper
1992Smart CMOS capacitive pressure transducer with on-chip calibration capability
Mehlhorn, T.; Benzel, H.W.; Brockherde, W.; Kopystynski, P.; Obermeier, E.; Schnatz, F.V.; Schöneberg, U.
Journal Article
1991CMOS integrated capacitive pressure transducer with on-chip electronics and digital calibration
Kopystynski, P.; Mehlhorn, T.; Benzel, H.; Brockherde, W.; Obermeier, E.; Schnatz, F.V.; Schöneberg, U.
Conference Paper
1990CMOS kompatibler Drucksensor in planarer Ätztechnik mit integrierter Ausleseelektronik
Eichholz, J.; Kandler, M.; Manoli, Y.; Mokwa, W.
Conference Paper