Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2001Adjustment and mounting of stencil masks for ion projection lithography
Damm, C.; Peschel, T.; Gebhardt, A.; Kirschstein, U.
Journal Article
2001Wafer stage assembly for ion projection lithography
Damm, C.; Peschel, T.; Risse, S.; Kirschstein, U.
Journal Article
1999A new metrology stage for Ion Projection Lithography made of glass ceramics
Risse, S.; Peschel, T.; Damm, C.; Kirschstein, U.
Conference Paper
1993Diamond membranes with controlled stress for submicron lithography
Bluhm, A.; Löchel, B.; Buchmann, L.-M.; Huber, H.-L.; Klages, C.-P.; Schäfer, L.
Journal Article, Conference Paper
1988Sub-0.5-mym lithography with a new ion projection lithography machine using silicon open stencil masks
Csepregi, L.; Heuberger, A.; Müller, K.P.; Chalupka, A.; Hammel, E.; Löschner, H.; Stengl, G.; Buchmann, L.-M.
Journal Article