Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2014Ionized sputtering with a pulsed hollow cathode magnetron
Fietzke, Fred; Krätzschmar, Bernd
Journal Article
1991Ion and electron dynamics in the sheath of radio-frequency glow discharges.
Koidl, P.; Wild, C.
Journal Article
1989Ion energy distribution in the sheath of radio frequency discharges.
Koidl, P.; Wild, C.
Journal Article