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Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2003Imaging method for laterally resolved measurement of minority carrier densities and lifetimes: measurement principle and first applications
Isenberg, J.; Riepe, S.; Glunz, S.W.; Warta, W.
Journal Article
1997A novel XPS system for integration into advanced semiconductor equipment for in-line process control
Kasko, I.; Oechsner, R.; Schneider, C.; Pfitzner, L.; Ryssel, H.; Trubitsyn, A.A.; Kratenko, V.I.
Conference Paper