Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
1997Assembly of hybrid micro systems in a large-chamber scanning electron microscope by use of mechanical grippers
Weck, M.; Hümmler, J.; Petersen, B.
Conference Paper
1997Assembly of micro systems in a large-chamber scanning electron microscope
Weck, M.; Hümmler, J.; Petersen, B.
Conference Paper