Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2018Detailed characterisation of focused ion beam induced lateral damage on silicon carbide samples by electrical scanning probe microscopy and transmission electron microscopy
Stumpf, Florian; Abu Quba, A.A.; Singer, Philip; Rumler, Maximilian; Cherkashin, Nikolay; Schamm-Chardon, Sylvie; Cours, Robin; Rommel, Mathias
Journal Article
2018Investigation of Ga ion implantation-induced damage in single-crystal 6H-SiC
He, Zhongdu; Xu, Zongwei; Rommel, Mathias; Yao, Boteng; Liu, Tao; Song, Ying; Fang, Fengzhou
Journal Article
2017Materials response to glancing incidence femtosecond laser ablation
Echlin, M.P.; Titus, M.S.; Straw, M.; Gumbsch, P.; Pollock, T.M.
Journal Article
2014Fabrication of customizable wedged multilayer Laue lenses by adding a stress layer
Niese, Sven; Krüger, Peter; Kubec, Adam; Laas, Roman; Gawlitza, Peter; Melzer, Kathleen; Braun, Stefan; Zschech, Ehrenfried
Journal Article
2014Formation and evolution of ultrashort pulse-induced nanogratings in Borosilicate glass
Zimmermann, Felix; Plech, Anton; Richter, Sören; Tünnermann, Andreas; Nolte, Stefan
Conference Paper
2014Morphological evolution of nanopores and cracks as fundamental components of ultrashort pulse laser-induced nanogratings
Zimmermann, Felix; Plech, Anton; Richter, Sören; Tünnermann, Andreas; Nolte, Stefan
Conference Paper
2013Evaluation of resistless Ga+ beam lithography for UV NIL stamp fabrication
Rumler, Maximilian; Fader, Robert; Haas, Anke; Rommel, Mathias; Bauer, Anton; Frey, Lothar
Journal Article
2013Highly resolved analysis of the chemistry and mechanical properties of an a-C:H coating system by nanoindentation and auger electron spectroscopy
Schmid, C.; Maier, V.; Schaufler, J.; Butz, B.; Spiecker, E.; Meier, S.; Göken, M.; Durst, K.
Conference Paper, Journal Article
2013Processing of silicon nanostructures by Ga+ resistless lithography and reactive ion etching
Rommel, M.; Rumler, M.; Haas, A.; Bauer, A.J.; Frey, L.
Journal Article
2013The underlying structure of ultrashort pulse laser-induced nanogratings
Zimmermann, Felix; Richter, Sören; Plech, Anton; Döring, Sven; Heinrich, Matthias; Steinert, Michael; Peschel, Ulf; Kley, Ernst-Bernhard; Tünnermann, Andreas; Nolte, Stefan
Conference Paper
2012FIB preparation and SEM investigations for three-dimensional analysis of cell cultures on microneedle arrays
Friedmann, A.; Cismak, A.; Tautorat, C.; Koester, P.J.; Baumann, W.; Held, J.; Gaspar, J.; Ruther, P.; Paul, O.; Heilmann, A.
Journal Article
2012On the fundamental structure of femtosecond laser-induced nanogratings
Richter, Sören; Plech, Anton; Steinert, Michael; Heinrich, Matthias; Döring, Sven; Zimmermann, Felix; Peschel, Ulf; Kley, Ernst Bernhard; Tünnermann, Andreas; Nolte, Stefan
Journal Article
2012Reliability of thermosonic bonded palladium wires in high temperature environments up to 350 °C
Heiermann, Wolfgang; Geruschke, Thomas; Grella, Katharina; Bartsch, M.; Borrmann, Thomas; Ruß, Marco; Vogt, Holger
Conference Paper
2012Simple and efficient method to fabricate nano cone arrays by FIB milling demonstrated on planar substrates and on protruded structures
Rommel, M.; Bauer, A.J.; Frey, L.
Journal Article, Conference Paper
20113D simulation of sputter etching with the Monte-Carlo approach
Kunder, D.
Dissertation
2011Investigation of cell-substrate interactions by focused ion beam preparation and scanning electron microscopy
Friedmann, A.; Hoess, A.; Cismak, A.; Heilmann, A.
Journal Article
2011Light confinement by structured metal tips for antenna-based scanning near-field optical microscopy
Jambreck, J.D.; Böhmler, M.; Rommel, M.; Hartschuh, A.; Bauer, A.J.; Frey, L.
Conference Paper
2010Comprehensive study of focused ion beam induced lateral damage in silicon by scanning probe microscopy techniques
Rommel, M.; Spoldi, G.; Yanev, V.; Beuer, S.; Amon, B.; Jambreck, J.; Petersen, S.; Bauer, A.J.; Frey, L.
Journal Article
2010Fabrication of metallic SPM tips by combining UV nanoimprint lithography and focused ion beam processing
Jambreck, J.D.; Schmitt, H.; Amon, B.; Rommel, M.; Bauer, A.J.; Frey, L.
Journal Article, Conference Paper
2010Influence of FIB patterning strategies on the shape of 3D structures: Comparison of experiments with simulations
Rommel, M.; Jambreck, J.D.; Ebm, C.; Platzgummer, E.; Bauer, A.J.; Frey, L.
Journal Article, Conference Paper
2010Manufacturing, characterization, and application of nanoimprinted metallic probe demonstrators for electrical scanning probe microscopy
Jambreck, J.D.; Yanev, V.; Schmitt, H.; Rommel, M.; Bauer, A.J.; Frey, L.
Poster
2010Nanoimprinted metallic probe demonstrators for electrical scanning probe microscopy: Manufacturing, characterization, and application
Jambreck, J.D.; Yanev, V.; Schmitt, H.; Rommel, M.; Bauer, A.J.; Frey, L.
Poster
2009Fabrication of metallic SPM tips by combining UV nanoimprint lithography and focused ion beam processing
Jambreck, J.D.; Schmitt, H.; Amon, B.; Rommel, M.; Bauer, A.J.; Frey, L.
Poster
2008Experimental observation of FIB induced lateral damage on silicon samples
Spoldi, G.; Beuer, S.; Rommel, M.; Yanev, V.; Bauer, A.J.; Ryssel, H.
Poster
2006Influence of intermetallic phases on reliability in thermosonic Au-Al wire bonding
Müller, T.; Schräpler, L.; Altmann, F.; Knoll, H.; Petzold, M.
Conference Paper
2006TEM-Präparation mittels "low-voltage-FIB"
Altmann, F.; Graff, A.; Simon, M.; Hoffmeister, H.; Gnauck, P.
Journal Article
2005Effekte bei der Nanostrukturierung mittels fokussierter Ionenstrahlen
Lehrer, C.
Dissertation
2005An electron microscope study of the in situ interaction between CaF2-like precipitates and dental enamel surfaces
Petzold, M.; Berthold, L.; Cismak, A.; Wohlfart-Zhou, J.; Schaller, H.-G.
Journal Article
2003FIB-Zielpräparation von TEM-Proben mittels Nadelmanipulationstechnik
Altmann, F.
Journal Article
1996Tetramethoxysilane as a precursor for focused ion beam and electron beam assisted insulator (SiO(x)) deposition
Lipp, S.; Frey, L.; Lehrer, C.; Frank, B.; Demm, E.; Pauthner, S.; Ryssel, H.
Journal Article
1995Local material removal by focused ion beam milling and etching
Lipp, S.; Frey, L.; Franz, G.; Demm, E.; Petersen, S.; Ryssel, H.
Journal Article
1995Local material removal by focused ion beam milling and etching
Lipp, K.; Frey, L.; Franz, G.; Demm, E.; Petersen, S.; Ryssel, H.
Conference Paper