Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
20063-D overlay assembly of mechanical components with sub-micron accuracy
Mohaupt, M.; Eberhardt, R.; Beckert, E.; Damm, C.; Peschel, T.; Tünnermann, A.
Conference Paper
2006Assembly of an aperture plate system for projection mask-less lithography
Mohaupt, M.; Eberhardt, R.; Damm, C.; Peschel, T.; Tünnermann, A.; Haugeneder, E.; Döring, H.-J.; Brandstätter, C.
Conference Paper, Journal Article
1999Präzisionsmechanismen für Positioniersysteme
Dörrer, P.
Book Article
1998Design of high precision mechanisms for generation of rotary motion using piezoelectric actuators
Dörrer, P.
Conference Paper