Fraunhofer-Gesellschaft

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Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2021Agile spectral tuning of high order harmonics by interference of two driving pulses
Schuster, V.; Hilbert, V.; Klas, R.; Liu, C.; Tschernajew, M.; Bernhardt, B.; Rothhardt, J.; Limpert, J.
Journal Article
2020Accuracy analysis of a stand-alone EUV spectrometer for the characterization of ultrathin films and nanoscale gratings
Schröder, Sophia; Bahrenberg, Lukas; Eryilmaz, Nimet Kutay; Glabisch, Sven; Danylyuk, Serhiy; Brose, Sascha; Stollenwerk, Jochen; Loosen, Peter
Conference Paper
2020Computational proximity lithography with extreme ultraviolet radiation
Deuter, Valerie; Grochowicz, Maciej; Brose, Sascha; Biller, Jan; Danylyuk, Serhiy; Taubner, Thomas; Siemion, Agnieszka; Grützmacher, Detlev; Juschkin, Larissa
Journal Article
2020Novel high-contrast phase-shifting masks for EUV interference lithography
Lüttgenau, Bernhard; Brose, Sascha; Danylyuk, Serhiy; Stollenwerk, Jochen; Loosen, Peter
Conference Paper
2016Inverse image modeling for defect detection and optical system characterization
Xu, Dongbo
: Erdmann, Andreas
Dissertation
2004Frequency scaling in a hollow-cathode-triggered pinch plasma as radiation source in the extreme ultraviolet
Rosier, O.; Apetz, R.; Bergmann, K.; Jonkers, J.; Wester, R.; Neff, W.; Pankert, J.
Journal Article
2001A multi-kilohertz pinch plasma radiation source for extreme ultraviolet lithography
Bergmann, K.; Rosier, O.; Lebert, R.; Neff, W.; Poprawe, R.
Journal Article