Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2008Wet etching study of La0.67(Sr0.5Ca0.5)(0.33)MnO3 films on silicon substrates
Kim, J.-H.; Grishin, A.M.; Ignatova, V.A.
Journal Article
2002Highly selective etching of deep silica components using electron cyclotron resonance plasma
Ferstl, M.
Journal Article
2002MOVPE-based in-situ etching of InP epitaxial heterostructures
Wolfram, P.; Franke, D.; Ebert, W.; Grote, N.
Conference Paper
1993SIMOX and wafer bonding, combination of competitors complements one another
Gassel, H.; Vogt, H.
Conference Paper