Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2009Actuators to be integrated in low temperature cofired ceramics (LTCC) microfluidic systems
Klumbies, H.; Partsch, U.; Goldberg, A.; Gebhardt, S.; Keitel, U.; Neubert, H.
Conference Paper
1998Surface-micromachined electrostatic microrelay
Schiele, I.; Huber, J.; Hillerich, B.; Kozlowski, F.
Conference Paper
1997Infrared micromirror array with large pixel size and large deflection angle
Wagner, B.; Reimer, K.; Maciossek, A.; Hofmann, U.
Conference Paper
1997Micromechanical relay with electrostatic actuation
Schiele, I.; Hillerich, B.; Kozlowski, F.; Evers, C.
Conference Paper