Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2009High productive deposited Mo layers for back ohmic contacts of solar cells
Heinß, J.-P.; Händel, F.; Meyer, T.; Würz, R.
Journal Article, Conference Paper
1999Comparison of beam-induced deposition using ion microprobe
Park, Y.S.; Nagai, T.; Takai, M.; Lehrer, C.; Frey, L.; Ryssel, H.
Journal Article, Conference Paper
1998The hollow cathode. A high-performance tool for plasma-activated deposition
Morgner, H.; Neumann, M.; Straach, S.; Krug, M.
Conference Paper
1998In situ-force measurement for the determination of the evaporation rate with high-rate electron beam evaporation
Scheffel, B.; Goedicke, K.
Conference Paper, Journal Article
1997Oberflächenmodifikation von BOPP-Folien
Bader, H.; Gessler, M.; Rodler, N.
Journal Article
1996Tetramethoxysilane as a precursor for focused ion beam and electron beam assisted insulator (SiO(x)) deposition
Lipp, S.; Frey, L.; Lehrer, C.; Frank, B.; Demm, E.; Pauthner, S.; Ryssel, H.
Journal Article
1995Conductivity and reproducibility of e-beam induced deposited tungsten lines
Kohlmann van Platen, K.T.; Schmidt, L.; Brünger, W.H.
Conference Paper
1993Investigation of fabrication parameters for the electron-beam induced deposition of contamination tips used in atomic force microscopy
Schiffmann, K.I.
Journal Article
1991A reliable fabrication technique for very low resistance ohmic contacts to p-InGaAs using low energy Ar+ ion beam sputtering
Stareev, G.; Umbach, A.; Fidorra, F.; Roehle, H.
Conference Paper
1989X-ray mask repair by electron beam induced metal deposition
Brünger, W.H.
Conference Paper