Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2001Mo/Si multilayers with different barrier layers for applications as EUV mirrors
Braun, S.; Mai, H.; Moss, M.; Scholz, R.
Conference Paper
2000Microstructure characterization of metal interconnects and barrier layers: Status and future
Zschech, Ehrenfried; Besser, P.R.
Conference Paper
1997Titanium monophosphide (TiP) layers as potential diffusion barriers
Leutenecker, R.; Fröschle, B.; Ramm, P.
Conference Paper
1997Titanium monophosphide (TiP) layers as potential diffusion barriers
Leutenecker, R.; Fröschle, B.; Ramm, P.
Conference Paper